초록 ▼

An electroplating system circulates solution between an anode and a workpiece mounted to a cathode. A shaped agitation paddle is reciprocated immediately adjacent to the cathode workpiece to improve performance of the system. The paddle is an elongated prism having a generally flat side that is para

An electroplating system circulates solution between an anode and a workpiece mounted to a cathode. A shaped agitation paddle is reciprocated immediately adjacent to the cathode workpiece to improve performance of the system. The paddle is an elongated prism having a generally flat side that is parallel to the workpiece. The flat side has a fluid port connected to a pump. The solution may be pumped with either positive pressure to force the solution against the surface of the workpiece, or negative pressure to draw the solution away from the surface of the workpiece. In an alternate embodiment, the cathode workpiece is rotated in the solution above an anode with a stationary, shaped paddle in between them.

대표청구항 ▼

1. An assembly for electroplating a substantially planar workpiece, comprising:a cell for containing a volume of electrolyte solution; an anode positioned in the cell; a cathode positioned in the cell and having a surface adapted to support the workpiece in the cell; an agitation paddle positioned i

1. An assembly for electroplating a substantially planar workpiece, comprising:a cell for containing a volume of electrolyte solution; an anode positioned in the cell; a cathode positioned in the cell and having a surface adapted to support the workpiece in the cell; an agitation paddle positioned in the cell between the cathode and the anode, and having an interior fluid delivery chamber and a paddle surface that is substantially parallel to and facing the cathode; at least one port in the paddle surface; a pump in fluid communication with the paddle for moving solution through the interior fluid delivery chamber and the port; and wherein one of the cathode and the paddle moves relative to the other.