초록 ▼

A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and

A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.

대표청구항 ▼

A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and

A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity. the first curved surfaces defining intersections between adjacent side walls, each of the first curved surfaces extending upward from the bottom of the electrolytic cell receptacle to an opening of the electrolytic cell receptacle; wherein the overflow and drainage system comprises a box attached to one of the side walls, the box located near the opening of the electrolytic cell receptacle and the box of the overflow and drainage system is attached to one of the side walls using a vinyl ester resin. 4. In an electrolytic cell receptacle for electrowinning or electrorefining of nonferrous metals, the electrolytic cell receptacle having side walls and a bottom extending between the side walls, said bottom and side walls of the electrolytic cell receptacle comprised of a polymer concrete and having substantially planar surfaces defining interior and exterior portions of the electrolytic cell receptacle, wherein at least a portion of the polymer concrete is reinforced with a pre-woven mesh, the electrolytic cell receptacle also having an overflow and draining system, and electrolyte feed system, and a seismic-resistance support system, wherein the improvement comprises: first curved surfaces located on the interior portion of the electrolytic cell receptacle, the first curved surfaces defining intersections between adjacent side walls, each of the first curved surfaces extending upward from the bottom of the electrolytic cell receptacle to an opening of the electrolytic cell receptacle; wherein the overflow and drainage system comprises: an insert installed in an aperture in one of the side walls a buffer block extending outward from the insert and from the interior portion of the electrolytic cell receptacle, the buffer block located near the opening of the electrolytic cell receptacle; an end block located on the bottom of the electrolytic cell receptacle; a drain pipe slidably mounted in holes formed in the buffer block and the end block; and a conical resilient ring disposed within the hole in the end block, the conical resilient ring forming a seal between the drain pipe and the end block; wherein the bottom of the electrolytic cell receptacle has a drain hole in substantial alignment with the hole in the end block, and the drain pipe provides access to the drain hole when the drain pipe is positioned within the end block. 5. The electrolytic cell receptacle of claim 4, wherein an interface between the insert and the aperture in one of the side walls is a dovetail joint. 6. The electrolytic cell receptacle of claim 4, wherein the insert is attached to one of the side walls using a vinyl ester resin. 7. In an electrolytic cell receptacle for electrowinning or electrorefining of nonferrous metals, the electrolytic cell receptacle having side walls and a bottom extending between the side walls, said bottom and side walls of the electrolytic cell receptacle comprised of a polymer concrete and having substantially planar surfaces defining interior and exterior portions of the electrolytic cell receptacle, wherein at least a portion of the polymer concrete is reinforced with a pre-woven mesh, the electrolytic cell receptacle also having an overflow and draining system, and electrolyte feed system, and a seismic-resistance support system, wherein the improvement comprises: first curved surfaces located on the interior portion of the electrolytic cell receptacle, the first curved surfaces defining intersections between adjacent side walls, each of the first curved surfaces extending upward from the bottom of the electrolytic cell receptacle to an opening of the electrolytic cell receptacle; wherein the electrolyte feed system comprises: an insert installed in an aperture in one of the side walls; a buffer block extending outward from the insert and from the interior portion of the electrolytic cell receptacle, the buffer block located near the opening of the electrolytic cell receptacle; an end block located