초록 ▼

The present invention relates to compositions for the chemical mechanical planarization ("CMP") of barrier/adhesion layers, particularly Ta/TaN barrier/adhesion layers as occur in the manufacture of integrated circuits. CMP compositions comprise an aqueous solution of oxidizer and colloidal silica a

The present invention relates to compositions for the chemical mechanical planarization ("CMP") of barrier/adhesion layers, particularly Ta/TaN barrier/adhesion layers as occur in the manufacture of integrated circuits. CMP compositions comprise an aqueous solution of oxidizer and colloidal silica abrasive. Oxidizers include hydroxylamine nitrate, nitric acid, benzotriazole, ammonium nitrate, aluminum nitrate, hydrazine and mixtures thereof in aqueous solution.

대표청구항 ▼

The present invention relates to compositions for the chemical mechanical planarization ("CMP") of barrier/adhesion layers, particularly Ta/TaN barrier/adhesion layers as occur in the manufacture of integrated circuits. CMP compositions comprise an aqueous solution of oxidizer and colloidal silica a

The present invention relates to compositions for the chemical mechanical planarization ("CMP") of barrier/adhesion layers, particularly Ta/TaN barrier/adhesion layers as occur in the manufacture of integrated circuits. CMP compositions comprise an aqueous solution of oxidizer and colloidal silica abrasive. Oxidizers include hydroxylamine nitrate, nitric acid, benzotriazole, ammonium nitrate, aluminum nitrate, hydrazine and mixtures thereof in aqueous solution. of key sentences from one of the topic passages in the hierarchical structure depending on a use condition of the keywords; and an outputting unit outputting the key sentences as a digest. 7. The digest generator apparatus according to claim 6, wherein said structure detecting unit calculates said cohesion degree in the vicinity area of said each position based on a similarity of a vocabulary included in two windows set up before and after said each position, and repeats the detection of the set of the topic boundaries while reducing a window width. 8. The digest generator apparatus according to claim 6, wherein said structure detecting unit comprises a candidate section detecting unit handling a moving average of said cohesion degree as both a forward cohesion force at the beginning of a moving average zone and a backward cohesion force at the end of the moving average zone, recognizing the vicinity area of a position where the forward cohesion force and the backward cohesion force balance each other as a candidate section of one of the topic boundaries, and identifying the one of the topic boundaries using the candidate section. 9. The digest generator apparatus according to claim 6, further comprising: a major part specifying unit removing a document portion having a lower cohesion degree and extracting a document portion having a higher cohesion degree as a major part, and wherein said sentence selecting unit selects said key sentences from a topic passage corresponding to the major part. 10. A digest generator apparatus, comprising: a keyword extracting unit evaluating whether or not a word is characteristic of a process target topic passage in a document by calculating a likelihood ratio based on a comparison of a use frequency of the word in the process target topic passage with a use frequency of the word in a longer topic passage including the process target topic passage and comparing the likelihood ratio to a predetermined threshold value, and extracting a keyword from the process target topic passage when the likelihood ratio is greater than the predetermined threshold value; a generating unit generating a digest according to a use condition of said keyword; and an outputting unit outputting said digest. 11. A digest generator apparatus, comprising: a unit repeatedly calculating a lexical cohesion degree in a vicinity of each position in a document to define topic passages in the document while varying a size of the vicinity; a major part specifying unit specifying a major part of the document to be summarized by removing one or more topic passages having a lower cohesion degree from the document; a generating unit generating a digest using said major part; and an outputting unit outputting said digest. 12. A computer-readable storage medium for storing a program which enables a computer to perform: detecting a set of topic boundaries of a document based on a lexical cohesion degree to detect a hierarchical structure of topic passages in the document, in which each of the topic passages corresponds to a part of the document describing a common topic, the hierarchical structure includes a plurality of levels, the topic passages in each of the levels compose the document, and each of the topic passages in a higher level includes one or more shorter topic passages in a lower level; extracting a plurality of keywords using the hierarchical structure; selecting a plurality of key sentences from one of the topic passages in the hierarchical structure depending on a use condition of the keywords; and generating a digest which includes of the key sentences. 13. The computer-readable storage medium according to claim 12, wherein said program enables the computer to perform: extracting local keywords from a summarization target topic; extracting global keywords from a longer topic passage including said summarization-target topic passage; selecting both sentences regarding a local topic a