[특허]Force compensated comb drive

[미국특허] Force compensated comb drive 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01C-019/00
출원번호	US-0076649 (2005-03-10)
등록번호	US-7302848 (2007-12-04)
발명자 / 주소	Kourepenis,Anthony S. Weinberg,Marc S. Elliott,Richard Daley,Steven
출원인 / 주소	The Charles Stark Draper Laboratory, Inc.
대리인 / 주소	Iandiorio & Teska
인용정보	피인용 횟수 : 14 인용 특허 : 25

초록 ▼

A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

대표청구항 ▼

What is claimed is: 1. A force compensated comb device for microelectromechanical system (MEMS) comprising: a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating said MEMS mechanism; a comb drive circuit for providing a drive signal to said comb drive for developing a force applied by said comb drive to said MEMS mechanism to effect a predetermined amplitude of displacement; an automatic gain control responsive to a change in said predetermined force to provide a correction signal to said comb drive circuit to maintain said predetermined force; and a compensation drive responsive to said correction signal for adjusting the output signal of said MEMS mechanism to compensate for errors in said output signal due to a change in said force. 2. The MEMS system of claim 1 in which said MEMS mechanism is a gyroscope. 3. The MEMS system of claim 1 in which said MEMS mechanism is a tuning fork gyroscope. 4. The MEMS system of claim 1 in which said MEMS mechanism is a temperature sensor. 5. The MEMS system of claim 1 in which said MEMS mechanism is a pressure sensor. 6. The MEMS system of claim 1 in which said compensation device includes microprocessor for executing an nth order constant coefficient equation. 7. The MEMS system of claim 6 in which said microprocessor is programmed to solve the equations wherein a rate output compensated for AGC effects is a function of uncompensated output voltage and an automatic gain control measured voltage. 8. The MEMS system of claim 7 in which said microprocessor is programmed to solve the equations description="In-line Formulae" end="lead"{circumflex over (Ω)}1=B(VAGC)+S(V AGC)Vgdescription="In-line Formulae" end="tail" where {circumflex over (Ω)}1 is a rate output compensated for AGC effects, Vg is raw (uncompensated) gyroscope output voltage, and VAGC is an automatic gain control measured voltage; description="In-line Formulae" end="lead"B(VAGC)=B0+B 1VAGC+B2VAGC2 +B3VAGC3+ . . .description="In-line Formulae" end="tail" where B(VAGC) is a modeled bias, a function of the measured AGC voltage; and description="In-line Formulae" end="lead"S(VAGC)=S0+S 1VAGC+S2VAGC2 +S3VAGC3+ . . .description="In-line Formulae" end="tail" where S(VAGC) is a modeled scale factor, a function of the measured AGC voltage.

이 특허에 인용된 특허 (25)

Ward Paul A. ; Kourepenis Anthony S., Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors.
상세보기
Bernstein Jonathan J. (Medfield MA) Weinberg Marc S. (Needham MA), Comb drive micromechanical tuning fork gyro.
상세보기
Bernstein Jonathan J. ; Weinberg Marc S., Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout.
상세보기
Seshia Ashwin A. ; Howe Roger T., Dual-mass micromachined vibratory rate gyroscope.
상세보기
Weinberg, Marc S.; Kumar, Kaplesh; King, A. Thomas, Dynamically balanced microelectromechanical devices.
상세보기
Ward Paul (Waltham MA), Electronics for Coriolis force and other sensors.
상세보기
Weinberg Marc S. ; Pinson John C., Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors.
상세보기
Watson, William S., High Q angular rate sensing gyroscope.
상세보기
Platt, William P., Increasing the dynamic range of a MEMS gyroscope.
상세보기
Greiff Paul, Low thermal strain flexure support for a micromechanical device.
상세보기
Ahmed Mansoor ; Jalloul Louay ; Rohani Kamyar, Method and system for generating a power control command in a wireless communication system.
상세보기
Borenstein, Jeffrey T., Method for microfabricating structures using silicon-on-insulator material.
상세보기
Sawyer, William David, Method of anodically bonding a multilayer device with a free mass.
상세보기
Cho Steve T. (Newport Beach CA), Method of making a micromechanical silicon-on-glass tuning fork gyroscope.
상세보기
Weinberg Marc S. ; Bernstein Jonathan J. ; Kirkos Gregory A. ; Lee Tommy W. ; Petrovich Anthony, Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation.
상세보기
Clark William A., Micromachined Z-axis vibratory rate gyroscope.
상세보기
Clark William A. ; Juneau Thor ; Howe Roger T., Micromachined vibratory rate gyroscope.
상세보기
Greiff Paul (Wayland MA) Boxenhorn Burton (Brookline MA), Micromechanical tuning fork angular rate sensor.
상세보기
Greiff Paul (Wayland MA) Boxenhorn Burton (Chestnut Hill MA), Micromechanical tuning fork angular rate sensor.
상세보기
Platt, William, Passive temperature compensation technique for MEMS devices.
상세보기
Weinberg Marc S. (Needham MA) Petrovich Anthony (Tewksbury MA), Quartz resonant gyroscope or quartz resonant tuning fork gyroscope.
상세보기
Greiff Paul (Wayland MA), Semiconductor chip transducer.
상세보기
Ward Paul A. ; Hildebrant Eric M. ; Niles Lance C. ; Weinberg Marc S. ; Kourepenis Anthony S., Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation.
상세보기
Weinberg Marc S. ; St. Michel Nathan A. ; Nokes David S. ; Borenstein Jeffrey T., Temperature compensated oscillating accelerometer with force multiplier.
상세보기
Ljung Per, Vibratory angular rate sensor.
상세보기

이 특허를 인용한 특허 (14)

Anac, Ozan; Huang, Xiaojun, Composite vibratory in-plane accelerometer.
상세보기
Dong, Jingyan; Ferreira, Placid M., Displacement actuation and sensing for an electrostatic drive.
상세보기
Seeger, Joseph; Borovic, Bruno, Extension-mode angular velocity sensor.
상세보기
Seeger, Joseph; Borovic, Bruno, Extension-mode angular velocity sensor.
상세보기
Waters, Richard Lee; Fralick, Mark Steven; Tally, IV, Charles Harold; Jacobs, John David, Extracting inertial information from nonlinear periodic signals.
상세보기
Waters, Richard Lee; Fralick, Mark Steven; Tally, IV, Charles Harold; Jacobs, John David, Extracting inertial information from nonlinear periodic signals.
상세보기
McNeil, Andrew C.; Lin, Yizhen; Park, Woo Tae, Laterally integrated MEMS sensor device with multi-stimulus sensing.
상세보기
Seeger, Joseph; Anac, Ozan, MEMS device with improved spring system.
상세보기
Seeger, Joseph; Anac, Ozan, MEMS device with improved spring system.
상세보기
Waters, Richard Lee; Jacobs, John David; Brayshaw, Jeffrey Alan; Chisum, Brad Wesley; Fralick, Mark Steven; Tally, IV, Charles Harold; Huang, Xiaojun, Systems and methods for controlling oscillation of a gyroscope.
상세보기
Waters, Richard Lee; Huang, Xiaojun; Tally, IV, Charles Harold; Zhang, Yanting; Jacobs, John David; Fralick, Mark Steven, Systems and methods for determining rotation from nonlinear periodic signals.
상세보기
Waters, Richard Lee; Jacobs, John David; Tally, IV, Charles Harold; Huang, Xiaojun; Zhang, Yanting; Fralick, Mark Steven, Systems and methods for extracting system parameters from nonlinear periodic signals from sensors.
상세보기
Waters, Richard Lee; Jacobs, John David; Tally, IV, Charles Harold; Huang, Xiaojun; Zhang, Yanting; Fralick, Mark Steven, Systems and methods for extracting system parameters from nonlinear periodic signals from sensors.
상세보기
Waters, Richard Lee; Jacobs, John David; Tally, IV, Charles Harold; Huang, Xiaojun; Zhang, Yanting; Fralick, Mark Steven, Systems and methods for extracting system parameters from nonlinear periodic signals from sensors.
상세보기

활용도 분석정보

상세보기

다운로드

내보내기

활용도 Top5 특허

해당 특허가 속한 카테고리에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.

내보내기 메뉴

내보내기 구분

파일저장
인쇄
메일전송

구성항목

기본정보
상세정보

관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC

저장형식

Text(ASCII format)
Excel format
PIAS분석(.xls)

메일정보

받는사람 (필수): @
보내는사람 (선택): @
제목
내용: KISTI 검색결과 이메일 서비스

안내

총 건의 자료가 검색되었습니다.

다운받으실 자료의 인덱스를 입력하세요. (1-10,000)

검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다.

데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요)

다운로드 파일은 UTF-8 형태로 저장됩니다.
파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오.

Text(ASCII format)
Excel format

AI-Helper ※ AI-Helper는 을 사용합니다.

AI-Helper

안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

연합인증

[미국특허] Force compensated comb drive 원문보기