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A method of forming a top coat layer and a topcoat material for use in immersion lithography. A topcoat layer is formed on a photoresist layer from an aqueous solution that is immiscible with the photoresist layer. The topcoat layer is then rendered insoluble in neutral water but remains soluble in

A method of forming a top coat layer and a topcoat material for use in immersion lithography. A topcoat layer is formed on a photoresist layer from an aqueous solution that is immiscible with the photoresist layer. The topcoat layer is then rendered insoluble in neutral water but remains soluble in aqueous-base developer solutions so the photoresist may be exposed in a immersion lithographic system using water as the immersion fluid, but is removed during photoresist development. The topcoat materials are suitable for use with positive, negative, dual tone and chemically amplified (CA) photoresist.

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What is claimed is: 1. A topcoat composition, comprising: a polymer comprising: a first monomer having the structure: a second monomer having the structure: where R1 is selected from the group consisting of a carboxylic acid group having 1 to 4 carbon atoms, R2 is an alkyl ester group of

What is claimed is: 1. A topcoat composition, comprising: a polymer comprising: a first monomer having the structure: a second monomer having the structure: where R1 is selected from the group consisting of a carboxylic acid group having 1 to 4 carbon atoms, R2 is an alkyl ester group of the form--CO--O--R' where R' is an alkyl group having 1 to 4 carbon atoms, and R3, R4, R5, R6, R7 and R8 are each independently selected from the group consisting of hydrogen, a linear alkyl group having 1-6 carbon atoms, a branched alkyl group having 2-12 carbon atoms, an alicyclic group having 3-8 carbon atoms, an alkyl ester group having 2 to 5 carbon atoms, an alkyl ether group having 2 to 8 carbon atoms, and a fluorinated alcohol group having 1-12 carbon atoms; water; and wherein about 3.6% by volume of said composition consists of concentrated aqueous NH4OH. 2. The composition of claim 1, wherein said R3, R4, R5, R6, R7 and R8 groups are not capable of reacting with said R1 group. 3. The composition of claim 1, wherein said R3, R4, R5, R6, R7 and R8 groups that are not H cause said polymer to be insoluble in water when said R1 group is not ionized. 4. The topcoat composition of claim 1, wherein about 4% by weight of said compositions consists of said polymer. 5. A topcoat composition, comprising: a polymer comprising: a first monomer having the structure: a second monomer having the structure: where R1 is selected from the group consisting of a carboxylic acid group having 1 to 4 carbon atoms, R2 is an alkyl ester group of the form--CO--O--R' where R' is an alkyl group having 1 to 4 carbon atoms, and R3, R4, R5, R6, R7 and R8 are each independently selected from the group consisting of hydrogen, a linear alkyl group having 1-6 carbon atoms, a branched alkyl group having 2-12 carbon atoms, an alicyclic group having 3-8 carbon atoms, an alkyl ester group having 2 to 5 carbon atoms, an alkyl ether group having 2 to 8 carbon atoms, and a fluorinated alcohol group having 1-12 carbon atoms; a volatile base; water; and wherein about 4% by weight of said compositions consists of said polymer. 6. The composition of claim 5, wherein said volatile base is a material selected from the group consisting of NH3, CH3NH2, (CH3)2NH, (CH3)3N, CH3CH2NH2, (CH3CH2)2NH, (CH3CH2)3N, other amines and combinations thereof. 7. The composition of claim 5, wherein said volatile base is NH3. 8. The composition of claim 5, wherein said R3, R4, R5, R6, R7 and R8 groups are not capable of reacting with said R1 group. 9. The composition of claim 5, wherein said R3, R4, R5, R6, R7 and R8 groups that are not H cause said polymer to be insoluble in water when said R1 group is not ionized. 10. A topcoat composition, comprising: a poly(isobornyl methacrylate-co-methyl methacrylate-co-tert-butyl methacrylate-co-methacrylic acid) copolymer; ammonia; and water. 11. The composition of claim 10, wherein about 3.6% by volume of said topcoat composition consists of concentrated aqueous NH4OH. 12. The composition of claim 10, wherein about 4% by weight of said topcoat composition consists of said polymer. 13. A topcoat composition, comprising: a polymer selected from the group consisting of poly(isobornyl methacrylate-co-methyl methacrylate-co-tert-butyl methacrylate-co-methacrylic acid) copolymer, poly(methyl methacrylate-co-methacrylic acid) copolymer and combinations thereof; about 3.6% by volume of concentrated aqueous NH4OH; and water. 14. The topcoat composition of claim 13, wherein said polymer consists of poly(methyl methacrylate-co-methacrylic acid) copolymer. 15. The composition of claim 13, wherein about 4% by weight of said topcoat composition consists of said polymer. 16. A topcoat composition, comprising: a polymer selected from the group consisting of poly(isobornyl methacrylate-co-methyl methacrylate-co-tert-butyl methacrylate-co-methacrylic acid) copolymer, poly(methyl methacrylate-co-methacrylic acid) copolymer and combinations thereof; ammonia; water; and wherein about 4% by weight of said topcoat composition consists of said polymer. 17. The composition of claim 16, wherein said polymer consists of poly(methyl methacrylate-co-methacrylic acid) copolymer.