초록 ▼

A method for cleaning a tube-shaped chamber after performing at least one deposition process includes equipping a tube-shaped cleaner into a loading chamber, loading the tube-shaped cleaner into the tube-shaped chamber and injecting a cleaning gas, and cleaning the tube-shaped chamber using the tube

A method for cleaning a tube-shaped chamber after performing at least one deposition process includes equipping a tube-shaped cleaner into a loading chamber, loading the tube-shaped cleaner into the tube-shaped chamber and injecting a cleaning gas, and cleaning the tube-shaped chamber using the tube-shaped cleaner.

대표청구항 ▼

What is claimed is: 1. A method for cleaning an inside wall of a tubular deposition chamber after performing a deposition process, comprising: a) providing a tube cleaner in a loading chamber; b) loading the tube cleaner from the loading chamber into a tubular deposition chamber having an inside wa

What is claimed is: 1. A method for cleaning an inside wall of a tubular deposition chamber after performing a deposition process, comprising: a) providing a tube cleaner in a loading chamber; b) loading the tube cleaner from the loading chamber into a tubular deposition chamber having an inside wall and injecting a cleaning gas; and c) cleaning the inside wall of the tubular deposition chamber using the tube cleaner, wherein the tube cleaner comprises a lamp assembly unit including a heat-source disposed therein for controlling cleaning temperature, a connection unit connected to the lamp assembly unit for connecting the cleaner to an elevator for moving the cleaner, and an exhausting unit coupled to the connection unit and having a path for exhausting cleaning by-product. 2. The method as recited in claim 1, wherein the cleaning gas HCl having a flow rate of 0.5 slm to 5.0 slm. 3. The method as recited in claim 2, wherein the cleaning gas further comprises hydrogen having a flow rate of 5.0 slm to 50.0 slm. 4. The method as recited in claim 1, comprising carrying out c) using a fixed tube cleaner. 5. The method as recited in claim 1, comprising carrying out c) using a moving tube cleaner. 6. The method as recited in claim 5, wherein the tubular chamber is vertical, and comprising moving the moving tube cleaner vertically while cleaning the tubular chamber.