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Proactive arc management of a plasma load 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05F-001/00
출원번호 US-0859998 (2010-08-20)
등록번호 US-8552665 (2013-10-08)
발명자 / 주소
  • Larson, Skip B.
  • Nauman, Jr., Kenneth E.
  • Walde, Hendrik
  • McDonald, R. Mike
출원인 / 주소
  • Advanced Energy Industries, Inc.
대리인 / 주소
    Neugeboren O'Dowd PC
인용정보 피인용 횟수 : 13  인용 특허 : 123

초록

Proactive arc management systems and methods are disclosed. In many implementations, proactive arc management is accomplished by executing an arc handling routine in response to an actual arc occurring in the plasma load and in response to proactive arc handling requests in a sampling interval. The

대표청구항

1. A proactive arc management module in a power supply having a power module providing power to a plasma load through arc management hardware, and a digital power monitor module monitoring the present voltage and current supplied to the plasma load, said proactive arc management module comprising: a

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이 특허를 인용한 특허 (13)

  1. Richter, Ulrich, Arc extinction arrangement and method for extinguishing arcs.
  2. Bhutta, Imran Ahmed, Electronically variable capacitor and RF matching network incorporating same.
  3. Bhutta, Imran Ahmed, High speed high voltage switching circuit.
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  11. Mavretic, Anton, Switching circuit.
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