|국가/구분||United States(US) Patent 등록|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 0 인용 특허 : 16|
The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.
1. A container containing a volume of monochlorosilane having an internal surface, wherein the internal surface comprises either carbon steel or stainless steel and has been modified by mechanical polishing followed by exposure to either a silicon hydride or a chlorosilane prior to storage of the monochlorosilane, wherein the container is capable of stably storing monochlorosilane such that the rate of decomposition of monochlorosilane is less than 0.1% per month at ambient temperature. 2. The container of claim 1 wherein the mechanical polishing was per...