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특허 상세정보

Cylinder surface treated container for monochlorosilane

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B65D-081/02    B24B-001/00   
미국특허분류(USC) 206/524.3; 451/028
출원번호 US-0090346 (2011-04-20)
등록번호 US-8590705 (2013-11-26)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Morris-Osaknian, Rosaleen P.
인용정보 피인용 횟수 : 0  인용 특허 : 16
초록

The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.

대표
청구항

1. A container containing a volume of monochlorosilane having an internal surface, wherein the internal surface comprises either carbon steel or stainless steel and has been modified by mechanical polishing followed by exposure to either a silicon hydride or a chlorosilane prior to storage of the monochlorosilane, wherein the container is capable of stably storing monochlorosilane such that the rate of decomposition of monochlorosilane is less than 0.1% per month at ambient temperature. 2. The container of claim 1 wherein the mechanical polishing was per...

이 특허에 인용된 특허 (16)

  1. Alan D. Zdunek ; Eugene A. Kernerman ; William Korzeniowski. Corrosion resistant gas cylinder and gas delivery system. USP2002046365227.
  2. Zdunek Alan D. ; Kernerman Eugene A. ; Korzeniowski William. Corrosion resistant gas cylinder and gas delivery system. USP2001076263904.
  3. Zdunek Alan D. ; Kernerman Eugene A. ; Korzeniowski William. Corrosion resistant gas cylinder and gas delivery system. USP2001096290088.
  4. Siegele Stephen H. ; Gregg John N. ; Noah Craig M.. High aspect ratio containers for ultrahigh purity chemicals. USP2000026029717.
  5. Felbaum,John W.. Inert-metal lined steel-bodied vessel end-closure device. USP2006047032768.
  6. Martrich,Robert Lee; Whitesell,Gordon Leon; Ngai,Eugene Yin; DeiTos,James Francis. Leak containment apparatus for reactive gases. USP2008117448402.
  7. Ohmi Tadahiro (2-1-17-302 ; Komegafukuro Sendai-shi ; Miyagi-ken JPX) Miki Masahiro (23-14-521 ; Tezukayama 1-Chome Abeno-ku ; Osaka JPX) Kikuyama Hirohisa (7-13 ; 3-Cho ; Ayameike Kita Nara-shi ; Na. Metal material with film passivated by fluorination and apparatus composed of the metal material. USP1991045009963.
  8. Joe, Raymond; Gumpher, John; Dip, Anthony. Method for extending time between chamber cleaning processes. USP2009107604841.
  9. Barone, Gary A.; Schuyler, Andy S.; Stauffer, Joseph. Method of passivating a gas vessel or component of a gas transfer system using a silicon overlay coating. USP2003016511760.
  10. Nozawa Shigeyoshi,JPX. Method of treating inner surface of high-pressure gas vessel. USP1998095803795.
  11. Fine Stephen M. (Emmaus PA) Johnson Andrew D. (Doylestown PA) Langan John G. (Wescosville PA). Moisture removal and passivation of surfaces. USP1996015479727.
  12. Bakay Carl James (Marietta OH). Process for making silane. USP1976073968199.
  13. Li Yao-En (Buffalo Grove IL) Rizos John (Frankfort IL) Kasper Gerhard (Downers Grove IL). Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in cont. USP1996015480677.
  14. Kikkawa,Akio; Kanayama,Shigeo; Harada,Isao. Processing method for high pressure gas container and halogen containing gas filled in said container. USP2006047021487.
  15. Davidson Jeffrey (Millburn NJ) Sherman Robert (New Providence NJ) Paciej Richard (Lansdale PA) Sakanaka Takashi (Tsurugashima JPX) Hayashi Shigeki (Sakai JPX) Nakahara Yoshiyuki (Osaka JPX). Stainless steel surface passivation treatment. USP1993115259935.
  16. Bindelle, Jean-Paul; Guiche, Philippe; De Francisco, Manuel; Borremans, Daniel; Cartage, Thierry. Thermal conditioning container and method of manufacturing it. USP2010047691337.