초록 ▼

It is provided a device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, wherein the device includes a drive unit for rotating the rotatable target; a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable targe

It is provided a device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, wherein the device includes a drive unit for rotating the rotatable target; a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and, a shield for covering the ring-shaped part. The shield is adapted for rotating together with the ring-shaped part and includes a plurality of parts assembled together. Furthermore, a sputtering apparatus and a method for supporting a rotatable target are provided.

대표청구항 ▼

1. A device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, the device comprising: a drive unit for rotating the rotatable target;a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and,a segmented

1. A device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, the device comprising: a drive unit for rotating the rotatable target;a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and,a segmented shield for covering the ring-shaped part;wherein said segmented shield is adapted for rotating together with said ring-shaped part; andwherein the segmented shield comprises a plurality of parts assembled together, each part for covering, at a radial distance from a central axis of the rind shaped part, less than a full circumference thereof. 2. The device of claim 1, wherein the plurality of parts are cylinder section parts forming a piecewise rotationally symmetric segmented shield. 3. The device of claim 2, wherein the parts are provided without a hole. 4. The device of claim 1, wherein the ratio of the length of the shield and the diameter of the shield is at maximum 0.5. 5. The device of claim 1, wherein the ratio of the length of the shield and the diameter of the shield is at maximum 0.3. 6. The device of claim 1, further comprising a top shield positioned at the top end of the rotatable target, wherein the top shield is adapted for rotating together with the rotatable target, and wherein the top shield comprises a plurality of parts assembled together. 7. The device of claim 6 wherein the segmented shield and the top shield are identical. 8. The device of claim 1, wherein the shield comprises two parts assembled together. 9. The device of any of claim 1, wherein said plurality of parts are assembled together by means of at least one securing device. 10. The device of claim 9, wherein the securing device comprises a snap ring. 11. The device of claim 1, wherein the shield comprises at least one notched channel along its perimeter for positioning at least one snap ring therein. 12. The device of claim 1, wherein said shield is electrically isolated from said ring-shaped part by means of at least one spacer. 13. The device of claim 12, wherein the at least one spacer comprises a plurality of clamping rods. 14. The device of claim 12, wherein the at least one spacer is comprised of insulating material. 15. The device of claim 14, wherein the insulating material comprises a thermal-resistant plastic. 16. Sputtering apparatus with at least one device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, the device comprising: a drive unit for rotating the rotatable target;a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and,a segmented shield for covering the ring-shaped part;wherein said segmented shield is adapted for rotating together with said ring-shaped part; andwherein the segmented shield comprises a plurality of parts assembled together, each part for covering, at a radial distance from a central axis of the ring shaped part, less than a full circumference thereof. 17. A method for supporting a rotatable target of a deposition apparatus for sputtering material on a substrate, the method comprising: providing a drive unit for rotating the rotatable target and a ring-shaped part connected to the rotatable target;assembling a plurality of parts together thereby forming a segmented shield for covering the ring-shaped part at a radial distance from a central axis of the ring shaped part, wherein each part covers less than a full circumference of the ring shaped part;wherein said segmented shield is connected to the ring-shaped part such that it covers said ring-shaped part and rotates together with said ring-shaped part. 18. The method of claim 17, wherein the segmented shield comprises a plurality of parts assembled concentrically to said ring-shaped part by means of a securing device. 19. The method of claim 18 wherein the securing device is a snap ring. 20. The device of claim 1, wherein the parts are segments linked together.