Fine leveling of large carousel based susceptor
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-014/50
H01L-021/687
C23C-016/455
C23C-016/458
출원번호
15657721
(2017-07-24)
등록번호
10501844
(2019-12-10)
발명자
/ 주소
Gangakhedkar, Kaushal
출원인 / 주소
Applied Materials, Inc.
대리인 / 주소
Servilla Whitney LLC
인용정보
피인용 횟수 :
0인용 특허 :
0
초록▼
Pedestal assemblies with a thermal barrier plate, a torque plate and at least one kinematic mount to change a plane formed by the thermal barrier plate are described. Susceptor assemblies and processing chambers incorporating the pedestal assemblies are also described. Methods of leveling a suscepto
Pedestal assemblies with a thermal barrier plate, a torque plate and at least one kinematic mount to change a plane formed by the thermal barrier plate are described. Susceptor assemblies and processing chambers incorporating the pedestal assemblies are also described. Methods of leveling a susceptor to form parallel planes between the susceptor surface and a gas distribution assembly surface are also described.
대표청구항▼
1. A pedestal assembly comprising: a thermal barrier plate with a top surface and a bottom surface defining a thickness, a center opening extends through the thickness of the thermal barrier plate at a center of the thermal barrier plate, at least one torque opening extending through at least the bo
1. A pedestal assembly comprising: a thermal barrier plate with a top surface and a bottom surface defining a thickness, a center opening extends through the thickness of the thermal barrier plate at a center of the thermal barrier plate, at least one torque opening extending through at least the bottom surface of the thermal barrier plate, and at least one leveling hole extending through the thickness of the thermal barrier plate, the at least one leveling hole located a distance from the center opening;a torque plate below the thermal barrier plate, the torque plate having a top surface and a bottom surface defining a thickness, a center opening extending through the thickness of the torque plate, at least one torque rod extending from the top surface of the torque plate, the at least one torque rod aligned with the at least one torque opening in the thermal barrier plate; andat least one kinematic mount assembly positioned within at least one leveling hole in the thermal barrier plate, the kinematic mount assembly comprising a mounting stud having an inner surface, an outer surface and a length defined by a top surface and a bottom surface, the mounting stud sized to fit within the leveling hole, the kinematic mount assembly including a lockdown screw positioned to contact the inner surface of the mounting stud and move along the length of the mounting stud. 2. The pedestal assembly of claim 1, wherein the top surface of the mounting stud is below the top surface of the thermal barrier. 3. The pedestal assembly of claim 1, wherein the inner surface of the mounting stud has an upper portion and a lower portion, the upper portion having a larger diameter than the lower portion. 4. The pedestal assembly of claim 3, wherein the lower portion of the inner surface of the mounting stud comprises screw threads. 5. The pedestal assembly of claim 4, wherein the screw threads of the lower portion have a pitch in the range of about 25 to about 50. 6. The pedestal assembly of claim 4, wherein there is a horizontal ledge separating the upper portion and the lower portion, the horizontal ledge providing a physical barrier to prevent a head of the lockdown screw with a diameter larger than the diameter of the lower portion from moving past the horizontal ledge. 7. The pedestal assembly of claim 4, wherein the outer surface of the mounting stud comprises outer screw threads and the leveling hole in the thermal barrier plate comprises screw threads complementary to the outer screw threads of the mounting stud. 8. The pedestal assembly of claim 1, wherein the lockdown screw has a lower surface with a convex shape and the torque plate further comprises a recess aligned with and sized to cooperatively interact with the lower surface of the lockdown screw. 9. The pedestal assembly of claim 1, wherein there are at least three mounting studs, each mounting stud in a different leveling hole in the thermal barrier plate. 10. The pedestal assembly of claim 1, wherein at least three torque pins pass through the thermal barrier plate to extend a distance above the top surface of the thermal barrier plate. 11. The pedestal assembly of claim 1, further comprising a support post connected to the torque plate. 12. The pedestal assembly of claim 11, wherein the support post includes a centering pillar that passes through the center hole of the torque plate and the center hole of the thermal barrier plate. 13. A susceptor assembly comprising: a susceptor having a top surface and a bottom surface defining a thickness, the susceptor having a plurality of recesses formed in the top surface sized to support a substrate for processing, a center opening extends from the bottom surface of the susceptor at least partially through the thickness, at least one susceptor torque opening extending from the bottom surface of the susceptor and at least three susceptor leveling holes extends through the thickness of the susceptor;a thermal barrier plate with a top surface and a bottom surface defining a thickness, the top surface of the thermal barrier plate positioned adjacent to the bottom surface of the susceptor, a center opening extends through the thickness of the thermal barrier plate at a center of the thermal barrier plate, at least one torque opening extending through the thickness of the thermal barrier plate and is aligned with the at least one susceptor torque opening, and at least three leveling holes extending through the thickness of the thermal barrier plate, each leveling hole aligned with a leveling hole in the susceptor;a torque plate below the thermal barrier plate, the torque plate having a top surface and a bottom surface defining a thickness, a center opening extends through the thickness of the torque plate and is aligned with the center opening in the thermal barrier plate, at least one torque rod extends from the torque plate through the at least one torque opening in the thermal barrier plate and into the at least one susceptor torque opening; andat least three kinematic mount assemblies, each kinematic mount assembly positioned in different leveling holes in the thermal barrier plate, each kinematic mount assembly comprising a mounting stud having an inner surface, an outer surface and a length defined by a top surface and a bottom surface, the mounting stud sized to fit within the leveling hole, the kinematic mount assembly including a lockdown screw positioned to contact the inner surface of the mounting stud and move along the length of the mounting stud. 14. The susceptor assembly of claim 13, wherein the inner surface of each mounting stud has an upper portion and a lower portion separated by a horizontal ledge, the upper portion having a larger diameter than the lower portion, the horizontal ledge providing a physical barrier to prevent a head of the lockdown screw from passing horizontal ledge. 15. The susceptor assembly of claim 14, wherein the lower portion of the inner surface of the mounting stud comprises screw threads. 16. The susceptor assembly of claim 15, wherein the screw threads of the lower portion have a pitch in the range of about 25 to about 50. 17. The susceptor assembly of claim 14, wherein the outer surface of the mounting stud comprises outer screw threads and the leveling hole in the thermal barrier plate comprises screw threads complementary to the outer screw threads of the mounting stud. 18. The susceptor assembly of claim 14, wherein the lockdown screw has a lower surface with a convex shape and the torque plate further comprises a recess aligned with and sized to cooperatively interact with the lower surface of the lockdown screw.
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