초록 ▼

■ Macro scaie의 자유표면 열유동 해석에 관하여 연구 수행
- fractionai step method 및 VOF 방법을 이용한 자유표면 위치 예측기법 개발
- 상변화를 동반하는 열유동 해석기법 개발
- 재료 물성의 유변학적 변화 해석기법 개발
■ 기존의 열해석 방법의 해상도를 향상시키는 방법 개발
- MEM (Maximun Entropy Methoct）를 적용하여 해상도 향상
- 열유속 산정용 역열전달 소프트웨어 개발
■ 급속열공정（RPT) 해석에 관한 연구 수행

■ Macro scaie의 자유표면 열유동 해석에 관하여 연구 수행
- fractionai step method 및 VOF 방법을 이용한 자유표면 위치 예측기법 개발
- 상변화를 동반하는 열유동 해석기법 개발
- 재료 물성의 유변학적 변화 해석기법 개발
■ 기존의 열해석 방법의 해상도를 향상시키는 방법 개발
- MEM (Maximun Entropy Methoct）를 적용하여 해상도 향상
- 열유속 산정용 역열전달 소프트웨어 개발
■ 급속열공정（RPT) 해석에 관한 연구 수행
- 급속열공정에서 복사열전달을 해석 수행
- 웨이퍼 표면의 균일한 온도를 유지할 수 있는 가열램프의 위치 및 온도를 계산할 수 있는 기법 개발

Abstract ▼

A. Free Surface Flow Analysis
- A numerical study was performed on flow and heat transfer involving moving free surfaces that occurs in mold filling processes such as casting and injection molding. The domain of the problem changes continuously and the numerical treatment of the moving interface

A. Free Surface Flow Analysis
- A numerical study was performed on flow and heat transfer involving moving free surfaces that occurs in mold filling processes such as casting and injection molding. The domain of the problem changes continuously and the numerical treatment of the moving interface is apt to cause artificial diffusion. Among the solution algorithms based on the Eulerian method, the volume-of-fluid (VOF) method was used because the method is simple and efficient in handling the complex flow patterns inside the cavity. To solve the transport equation of free surface without artificial smearing of the interface the baby―cell method was employed in the geometric reconstruction of the free surface. Furthermore, a predictor―corrector method was adopted in the time integration of volume―of―fluid transport equation to increase the accuracy. The proposed scheme was verified through several benchmark problems: the broken dam problem, the solitary and triangular wave propagation problems.
To show the capability of the proposed scheme, several three―dimensional mold filling processes were solved: simple bulky mold filling processes, simplified automobile wheel.
B. Inverse Heat Transfer Analysis
- Methodological studies on the inverse heat transfer problem are performed. A few practically important inverse heat transfer problems are investigated in this study. They are surface heat flux estimation. In order to attain reliable inverse solutions, the maximum entropy method is investigated. The maximum entropy method is applied to heat flux estimation. The method is verified to gives inverse solutions with enhanced resolution. The established inverse methodologies throughout this dissertation can be implemented straightforwardly for the required situation.
C. Rapid Thermal Processing
- An analysis for optimization of the rapid thermal processing (RTP) has been conducted to obtain uniform temperature distribution on the wafer surface by using a linear programming. In the evaluation of radiative heat transfer rate, the walls of the RTP chamber are assumed gray―diffuse to get the radiative heat flux and temperature of the surfaces. The optimal position of heating lamps is determined by a linear programming technique whose objective function is the uniformity of wafer temperature and whose equality constraint is heat balance in the RTP chamber. The RTP chamber is modeled as an axisymmetric cylinder whose diameter and height are 300 mm and 70 mm, respectively.
Results show that two heating lamp zones are needed to maintain the uniform wafer temperature. The optimal lamp positions are determined uniquely for a given chamber geometry regardless of prescribed wafer temperatures. The optimum radial locations of heating lamps are found to be 45 mm and 108 mm. With the obtained optimum condition, wafer surface temperatures are calculated to confirm the optimum results. The temperature variation on the wafer surface is less than 2 C when the wafer surface temperature is set at 1000 C.

목차 Contents

• 제1장 연구개발과제의 개요...11
• 제2장 국내외 기술개발 현황...13
• 제3장 연구개발수행 내용 및 결과...17
• 제1절 자유표면 유동 해석...17
• 제2절 역해석 기법 개발...52
• 제3절 급속열공정 해석...103
• 제4장 목표달성도 및 관련분야에의 기여도...153
• 제5장 연구개발결과의 활용계획...155
• 제6장 참고문헌...156