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| 주관연구기관 | 공주대학교 산학협력단 |
|---|---|
| 연구책임자 | 임진형 |
| 보고서유형 | 최종보고서 |
| 발행국가 | 대한민국 |
| 언어 | 한국어 |
| 발행년월 | 2011-06 |
| 과제시작연도 | 2010 |
| 주관부처 | 교육과학기술부 |
| 사업 관리 기관 | 한국연구재단 |
| 등록번호 | TRKO201200003033 |
| 과제고유번호 | 1345124693 |
| 사업명 | 일반연구자지원 |
| DB 구축일자 | 2013-05-20 |
| 키워드 | 기공형성물질.저유전 층간 절연막.나노기공 소재.porogen.low-k dielectrics.nanoporous materials. |
본 연구의 최종목표는 차세대 반도체 디바이스에 필요한 유전상수가 2.0이하의 초 저유전층간 절연막을 실제 반도체 공정에 적용할 수 있는 기반기술의 확보하기 위함이다. 1차년도 연구 목표은 3 nm이내의 나노기공을 저유전 전구체인 SSQ (silsesquioxane) 매트릭스내에 pore collapse 없이 도입할 수 있는 최적의 나노입자형 기공형성물질을 개발하고자 하였다. 2차년도 연구 목표는 제조된 저유전 박막내의 나노 기공의 구조 및 나노 입자형 기공 형성물질로부터 생성되는 pore forming mechanism을 In-si
The final goal of this research was a development of a solution of fundamental technology for adopting ultra low-k dielectrics materials to next generation semiconductor process. The goal of first year was a development of well designed nanoparticle type porogen, which could be formed nano pore belo
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![PM3-optimized structures of CA[4] and CA[6].](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_29_image_26.jpg "PM3-optimized structures of CA[4] and CA[6].")
![Temperature sweeped FT-IR spectra of (a) SSQ matrix film and (b) SSQ/CA[4] 30% hybrid film. ①: -OH, ②: aliphatic stretching, ③ Si-CH3,④:Si-O-Si,⑤:Si-OH,⑥C=O.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_31_image_27.jpg "Temperature sweeped FT-IR spectra of (a) SSQ matrix film and (b) SSQ/CA[4] 30% hybrid film. ①: -OH, ②: aliphatic stretching, ③ Si-CH3,④:Si-O-Si,⑤:Si-OH,⑥C=O.")
![FE-SEM photographs of the cross section of (a) SSQ film, (b) SSQ/[CA[4] 30% porous film.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_33_image_28.jpg "FE-SEM photographs of the cross section of (a) SSQ film, (b) SSQ/[CA[4] 30% porous film.")
![The summary of nanopore structure of the porous films made with the mixture of SSQ precursor and various content of CA[6] porogen loadings. All films are 1100-1500 nm thick](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_34_table_29.jpg "The summary of nanopore structure of the porous films made with the mixture of SSQ precursor and various content of CA[6] porogen loadings. All films are 1100-1500 nm thick")
![Typical isotherm of porous thin films prepared with SSQ and various composition of CA[6] compounds.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_35_image_30.jpg "Typical isotherm of porous thin films prepared with SSQ and various composition of CA[6] compounds.")
![Pore size distributions using EP of porous thin films prepared with SSQ and various content of CA[6] compounds.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_36_image_31.jpg "Pore size distributions using EP of porous thin films prepared with SSQ and various content of CA[6] compounds.")
![Pore size distributions by PALS of porous thin films prepared with SSQ and various content of CA[6] compounds. All films have an Al capping layer to keep the positronium confined to the film.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_36_image_32.jpg "Pore size distributions by PALS of porous thin films prepared with SSQ and various content of CA[6] compounds. All films have an Al capping layer to keep the positronium confined to the film.")
![(a) Ps escape fraction vs. mean positron implantation depth, (b) Mesopore Ps intensity in the capped films and pore interconnection length for the uncapped CA[6] templated nanoporous films](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_37_image_33.jpg "(a) Ps escape fraction vs. mean positron implantation depth, (b) Mesopore Ps intensity in the capped films and pore interconnection length for the uncapped CA[6] templated nanoporous films")
![Pore size distribution of SSQ/CA[6] 10% as a function of curing temperature](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_38_image_34.jpg "Pore size distribution of SSQ/CA[6] 10% as a function of curing temperature")
![(a) Ps intensities of SSQ/CA[6] 10% from intrinsic micropores of the SSQ matrix, mesopores generated by single CA[6] molecules, and vacuum, respectively, after progressive annealing. (b) Ps intensities of SSQ/CA[6] 20% from intrinsic micropores of the SSQ matrix, mesopores generated by CA[6] micelles, and vacuum, respectively, after progressive annealing.](https://nrms.kisti.re.kr/bitextimages/TRKO201200003033/TRKO201200003033_39_image_35.jpg "(a) Ps intensities of SSQ/CA[6] 10% from intrinsic micropores of the SSQ matrix, mesopores generated by single CA[6] molecules, and vacuum, respectively, after progressive annealing. (b) Ps intensities of SSQ/CA[6] 20% from intrinsic micropores of the SSQ matrix, mesopores generated by CA[6] micelles, and vacuum, respectively, after progressive annealing.")
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