Abstract ▼ AI-Helper

In this study, by using the correlation between static electricity and particle generated during the TFT LCD manufacturing process improved the final process defects, and an X-ray ionizer was installed in the soft bake unit for the first time to remove electrostatic charges of glass substrate. In th...

In this study, by using the correlation between static electricity and particle generated during the TFT LCD manufacturing process improved the final process defects, and an X-ray ionizer was installed in the soft bake unit for the first time to remove electrostatic charges of glass substrate. In the soft bake unit, the most common damage caused by static electricity is breakage to the glass substrate when it is lifted off. We often use a method of lowering the lift pin speed to prevent damage to the glass substrate.
To minimize the contact area between the plate of soft bake and the glass substrate, the surface of the plate is periodically grinded to maximize surface roughness.
Most particle in the soft bake unit are generated when the photoresist fume accumulated in the soft bake chamber falls to its own weight, sometimes particle caused by deterioration of the
cylinder that is driven in the process of opening and closing the chamber shutter for glass
transportation. The occurrence of particle has been controlled through periodic facility cleaning and parts replacement. To resolve customer complaints, at the first time we approached from the viewpoint of particle matter, and several times the facility was inspected, cleaned, and parts replaced, but could not be resolved. It is estimated that there will be an interaction between static electricity and particle through the defect map and shape. The first X-ray ionizer was installed in the soft bake facility, and It was confirmed that the final defect was improved by controlling the electrostatic adsorption of particle through the antistatic on the glass substrate.
The demand for high resolution products and the increase in the size of the substrate glass are continuously required in the future. Through this research, defects due to the interaction between static electricity and particles are expected to increase further, by controlling the interaction, we will be able to contribute to yield improvement.

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