Abstract ▼ AI-Helper

CP-MS (Inductively Coupled Plasma Mass Spectrometer) is one of the major instruments for monitoring the trace elements in the pharmaceutical, food, environmetal, semiconductor, metal industrial maket and etc. ICP-MS has the relatively wide detection range from ng/kg (ppt) to mg/kg (ppm) in concentra...

CP-MS (Inductively Coupled Plasma Mass Spectrometer) is one of the major instruments for monitoring the trace elements in the pharmaceutical, food, environmetal, semiconductor, metal industrial maket and etc. ICP-MS has the relatively wide detection range from ng/kg (ppt) to mg/kg (ppm) in concentration and takes olny a few minutes for analysis. So the commercial ICP-MS sales martket is steeply growing. Ar based plasma produces various interference ions such as 38Ar1H, 40Ar, 40Ar16O and so on. They makes the incorrect analysis on 39K, 40Ca, 56Fe and etc. HR-ICP-MS (High Resolution Inductively Coupled Plasma Mass Spectrometer) is most powerful instrument to determine the exact concentrations of analytes separated from the interferences with a double focusing sector mass.
The photo register used in semiconductor industry has been analyzed by means of HR-ICP-MS after dilution with NMP (N-methyl-2-pyrrolidone) simply. HR-ICP-MS is using the one unique method to detect the all elements in the various samples which are even contained 0.12% sulfur and showed good results. The recovery test with 20 pg/g spiked photo register showed 80∼110% in all elements. The LoDs (Limits of Detection) are below 20 pg/g in all elements except Ca (67.34 pg/g) and the LoQs (Limits of Quantification) are below 50 pg/g (Ca is 204.05 pg/g).
The chlorine has 0.46% ionization efficiency in the plasma turns rarely into ion. But HR-ICP-MS has enough sensitivity and selectivity showed 97% recovery from 50 pg/g spiked tests.

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