초록

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Abstract ▼ AI-Helper

Effects of the substrate pretreatment on uncleation density of the diamond thin films have been investigated. The film was prepared using the hot-filament CVD reactor with the mixture of methane and hydrogen. The substrate pretreatment was done in three different ways: predeposition of carbon on the...

Effects of the substrate pretreatment on uncleation density of the diamond thin films have been investigated. The film was prepared using the hot-filament CVD reactor with the mixture of methane and hydrogen. The substrate pretreatment was done in three different ways: predeposition of carbon on the substrate, soot on the substrate, and graphite on the substrate. All three cases enhanced the nucleation density of diamond. And the effect was more marked in the first and the second cases than in the third one. In the first case where the substrate was predeposited by the carbon phase, a very smooth and uniform film of diamond could be obtained. Since the bound strength between the substrate and the predeposited carbon phase is relatively weak, separation of the diamond film layer from the substrate was found to be easy.