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Abstract ▼ AI-Helper

The ultrafiltration characteristics of wafer processing wastewater produced from semicon¬ductor industry was investigated for wastewater reuse. Using the pilot-scale ultrafiltration system con¬taining poly sulfone hollow fiber membranes (MWCO : 10,000, 20,000, 30,(00), the membrane performan...

The ultrafiltration characteristics of wafer processing wastewater produced from semicon¬ductor industry was investigated for wastewater reuse. Using the pilot-scale ultrafiltration system con¬taining poly sulfone hollow fiber membranes (MWCO : 10,000, 20,000, 30,(00), the membrane performance, such as flux, rejection rate and concentration factor for flux was examined. The SDhs, turbidity, electrical conductivity and concentration of Si particles were measured, and the possibility of permeate reuse was validated from the experimental results. It was shown that the flux was recovered by the sweeping with air and water effectively. The permeate flux of 30,000 MWCO membrane was about 5 times higher than that of 10,000 and 20,000 MWCO membranes. The concentration of Si particle in the saw wastewater was analyzed 3.8-5.6 mg/$\ell$ and that of Si particle in the permeate was analyzed less than 0.2${\mu}g$/$\ell$. This means the rejection of silicon particle was over 96%.