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NTIS 바로가기정보과학회논문지. Journal of KISS : Computing practices. 컴퓨팅의 실제, v.6 no.3, 2000년, pp.311 - 318
The importance of the semiconductor industry in Korea has been growing, but the manufacturers are experiencing two major problems: poor optimization of production and low localization ratio of production equipments. Due to the complex manufacturing processes and special features such as OTD (On Time...
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이근영, '반도체 공정정보 관리 시스템 개발', 한국자동제어학술대회, Vol. 1, 1988
Atherton, Linda F & Atherton, Robert W., Wafer Fabrication : Factory Performance and Analysis, Kluwer Academic Press, Boston, MA, 1995
Stephen A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, New York, 1996
Ben G. Streetman, Solid State Electronic Devices, Prentice Hall, 1995
The Complete Silicon Run (VTR), Semiconductor Equipment and Materials International, 1997
Law, Averill M., Kelton, W. David, Simulation Modeling & Analysis, McGraw-Hill, 1991
Zeigler, B. P., Object-Oriented Simulation with Hierarchical, Modular Models, Academic Press, 1990
Liu, Chihwei, 'A Modular Production Planning System for Semiconductor Manufacturing,' Ph. D. Dissetation, University of California, Berkeley, 1992
R. C. Leachman, Modeling Techniques for Automated Production Planning in the Semiconductor Industry, Wiley, 1993
C. D. Geiger, R. Hase, C. G. Takoudis, and R. Uzsoy, 'Alternative Facility Layouts for Semiconductor Wafer Fabrication Facilities,' IEEE Transactions on Components, Packaging, and Manufacturing Technologies. Part C. : Manufacturing, Vol. 20, No. 2, pp 152-163, 1997
B. A. Peters and T. Yang, 'Integrated Facility Layout and Material Handing System Design in Semiconductor Fabrication Facilities,' IEEE Transactions on Semiconductor Manufacturing, Vol. 10, No.3, pp 360-369, 1997
Y. Narahari and L. M. Khan, 'Modeling the Effect of Hot Lots in Semiconductor Manufacturing Systems,' IEEE Transactions on Semiconductor Manufacturing, Vol. 10, No.1, pp 185-188, 1997
AutoMod Manual, Ver. 8.2, AutoSimulation, 1997
Charles A. Mirho, Andre Terrisse, Communications Programming For Windows 95, Microsoft Press, 1997
Mark Minasi, Windows NT Workstation 4, SYBEX, 1997
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