초록

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Abstract ▼ AI-Helper

Infrared sensors with one or two dimensional arrays are usually bonded via indium bumps to Si CMOS read out circuits. Therefore, both sensing of infrared beams and processing of signals are performed at the focal plane. This gives us a benefit of reducing noise as well as size of infrared detectors....

Infrared sensors with one or two dimensional arrays are usually bonded via indium bumps to Si CMOS read out circuits. Therefore, both sensing of infrared beams and processing of signals are performed at the focal plane. This gives us a benefit of reducing noise as well as size of infrared detectors. We have developed a way of boding indium bumps with keeping sensor and ROIC parallel to each other. The flip chip bonder developed has a very simple structure and is easy to operate. So we expect that reliability will be improved very much.