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NTIS 바로가기大韓機械學會論文集. Transactions of the Korean Society of Mechanical Engineers. A. A, v.25 no.3 = no.186, 2001년, pp.443 - 451
윤현중 (한국과학기술원 기계공학과) , 이두용
This paper addresses an on-line scheduling method for track systems in semiconductor fabrication. A track system is a clustered equipment performing photolithography process in semiconductor fabrication. Trends toward high automation and flexibility in the track systems accelerate the necessity of t...
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Biche, M., 1995, 'Trends in Track System Architecture,' Solid State Technology, pp. 83-86
Viswanadham, N. Narahari, Y. and Johnson, T. L., 1990, 'Deadlock Prevention and Deadlock Avoidance in Flexible Manufacturing Systems Using Petri Net Models,' IEEE Trans. Robotics and Automat., Vol. 6, No. 6, pp. 713-723
Banaszak, Z. A. and Krogh, B. H., 1990, 'Deadlock Avoidance in Flexible Manufacturing Systems with Concurrently Competing Process Flows,' IEEE Trans. Robotics and Automat., Vol. 6, No. 6, pp. 724-734
Ezpeleta, J. Colom, J. M. and Martinez, J., 1995, 'A Petri Net Based Deadlock Prevention Policy for Flexible Manufacturing Systems,' IEEE Trans. Robotics and Automat., Vol. 11, No. 2, pp. 173-184
Ezpeleta, J. and Colom, J. M., 1997, 'Automatic Synthesis of Colored Petri Nets for the Control of FMS,' IEEE Trans. Robotics and Automat., Vol. 13, No. 3, pp. 327-337
Fanti, M. P. Maione, B. Mascolo, S. and Turchiano, B., 1997, 'Event-Based Feedback Control for Deadlock Avoidance in Flexible Production Systems,' IEEE Trans. Robotics and Automat., Vol. 13, No. 3, pp. 347-363
Wysk, R. A. Yang, N. S. and Joshi, S., 1991, 'Detection of Deadlocks in Flexible Manufacturing Cell,' IEEE Trans. Robotics and Automat., Vol. 7, No. 6, pp. 853-859
Lawley, M. A., 1999, 'Deadlock Avoidance for Production System with Flexible Routing,' IEEE Trans. Robotics and Automat., Vol. 15, No. 3, pp. 497-509
Reveliotis, S. A., 1999, 'Accommodating FMS Operational Contingencies Through Rounting Flexibility,' IEEE Trans. Robotics and Automat., Vol. 15, No. 1, pp. 3-19
Perkinson, T. L. McLarty, P. K. Gyurcsik, R. S. and Carvin Ⅲ, R. K., 1994, 'Single-Wafer Cluster Tool Performance: An Analysis of Throughput,' IEEE Trans. Semiconduct. Manufact., Vol. 7, No. 3, pp. 369-373
Perkinson, T. L. Gyurcsik, R. S. McLarty, P. K., 1996, 'Single-Wafer Cluster Tool Performance: An Analysis of the Effects of Redundant Chambers and Revisitation Sequences on Throughput,' IEEE Trans. Semiconduct. Manufact., Vol. 9, No. 3, pp. 384-400
Venkatesh, S. Davenport, R. Foxhoven, P. and Nulman, J., 1997, 'A Steady-State Throughput Analysis of Cluster Tools: Dual-Blade Versus Single-Blade Robots,' IEEE Trans. Semiconduct. Manufact., Vol. 10, No. 4, pp. 418-424
Srinivasan, R. S., 1998, 'Modeling and Performance Analysis of Cluster Tools Using Petri Nets,' IEEE Trans. Semiconduct. Manufact., Vol. 11, No. 3, pp. 394-403
Bodner, D. A., 1996, 'Real-Time Control Approaches to Deadlock Management in Automated Manufacturing Systems,' Ph.D. Dissertation, Georgia Institute of Technology, Atlanta, GA
Lawley, M. A. Reveliotis, S. A. and Ferreira, P. M., 1998, 'A Correct and Scalable Deadlock Avoidance Policy for Flexible Manufacturing Systems,' IEEE Trans. Robotics and Automat., Vol. 14, No. 5, pp. 796-809
Zant, P. V., 1997, Microchip Fabrication: A Practical Guide to Semiconductor Processing. New York: McGraw-Hill
Goldberg, D. E., 1989, Genetic Algorithms in Search, Optimization, and Machine Learning. Reading, MA: Addison-Wesley
Luger G. F. and Stubblefield, W. A., 1993, Artificial Intelligence: Structures and Strategies for Complex Problem Solving. Redwood City, California: Benjamin/Cummings Publishing Company
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