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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.17 no.7, 2004년, pp.701 - 707
조수범 (인하대학교 정보통신공학과) , 박세근 (인하대학교 정보통신공학) , 오범환 (인하대학교 정보통신공학과)
High aspect ratio silicon structure through deep silicon etching process have become indispensable for advanced MEMS applications. In this paper, we present the results of modified Bosch process to obtain anisotropic silicon structure with conventional Inductively Coupled Plasma (ICP) etcher instead...
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Tian, W. -C., Weigold, J. W., Pang, S. W.. Comparison of Cl[sub 2] and F-based dry etching for high aspect ratio Si microstructures etched with an inductively coupled plasma source. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.18, no.4, 1890-.
Wells, T.. Low temperature reactive ion etching of silicon with SF[sub 6]/O[sub 2] plasmas. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.15, no.2, 434-.
Chen, Kuo-Shen, Ayon, A.A., Zhang, Xin, Spearing, S.M.. Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE). Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.11, no.3, 264-275.
Grigoropoulos, S.. Highly anisotropic silicon reactive ion etching for nanofabrication using mixtures ofSF[sub 6]/CHF[sub 3] gases. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.15, no.3, 640-.
Juan, W. H.. Controlling sidewall smoothness for micromachined Si mirrors and lenses. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.14, no.6, 4080-.
Gottscho, Richard A.. Microscopic uniformity in plasma etching. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.10, no.5, 2133-.
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