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NTIS 바로가기윤활학회지 = Journal of the Korean Society of Tribologists and Lubrication Engineers, v.20 no.5, 2004년, pp.284 - 291
김태완 (부산대학교 기계기술연구소) , 구영필 (부경대학교 기계공학부) , 조용주 (부산대학교 기계공학부)
We present a three-dimensional average flow model considering elastic deformation of pad asperities for chemical mechanical planarization. To consider the contact deformation of pad asperities in the calculation of the flow factor, three-dimensional contact analysis of a semi-infinite solid based on...
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