최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기電子工學會論文誌. Journal of the Institute of Electronics Engineers of Korea. SD, 반도체, v.42 no.6 = no.336, 2005년, pp.17 - 22
오데레사 (창원대학교 공과대학 나노신소재공학부)
Organic-inorganic hybrid type thin films are the next generation candidates as low-k materials. SiOC films are analyzed the bonding structure by the red and blue chemical shift using the fourier transform infraredspectra. Conventional chemical shift of organic chemistry is a red shift, but hybrid ty...
M. A. Tamor, C. H. Wu, R. O Carter and N. E. Lindsay, 'Pendant benzene in hydrogenated diamond-link carbon,' Appl. Phys. Lett. Vol. 55(14), pp. 1388-1390, 1989
H. J. Kim, Q. Shao and Y. H. Kim, 'Characterizaion of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection,' Surface and Coatings Technology, Vol. 171, pp. 39-45, 2003
P. Masri, 'Silicon carbide and silicon carbide -based structures,' The physics of epitaxy, Surface science reports, Vol. 48, pp. 1-5, 2002
A. Grill and D. A. Neumayer, 'Structure of low dielectric constant to extreme low dielectric constant SIOCH films: Fourier transform infrared spectroscopy characterization,' J. Appl. Phys. Vol. 94, pp. 6697-6707, 2003
K. S. OH, S. Y. JlNG, C. K. Choi, K. M. Lee and H. J. Lee, 'Formation and caracteristic of fluorinated amorphous carbon films deposited by CF4/CH4 ICPCVD,' Journal of the Korean Physical Society, Vol. 39, No. 2, pp. 291-295, 2001
G. Galli and R. M. Martin, 'Structural and electronic properties of amorphous carbon,' Phys. Rev. Lett. Vol. 62, No. 5, pp. 555-558, 1989
T. Oh, K. M. Lee, S. T. Ko, K. S. Kim, K. J. Ahn and C. K. Choi, ' Bonding Structure of the Cross-link in Organosilicate Films Using 02/BTMSM Precursors,' Jpn. J. Appl. Phys. Vol. 42, pp.1517-1520, 2003
T. Oh, H. S. Kim, S. B. Oh and M. S. Won, 'The Chemical Shift According To The flow Rate Ratio 02/BTMSM by FTIR and XPS,' Jpn. J. Appl. Phys. Vol. 42, pp. 6292-6295, 2003
X. Li, L. Liu and H. B. Schlegel, 'On the physical origin of blue shifted hydrogen bonds,' J. AM. CHEM. SOC. Vol. 124, pp. 9639-9647, 2000
※ AI-Helper는 부적절한 답변을 할 수 있습니다.