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NTIS 바로가기韓國眞空學會誌 = Journal of the Korean Vacuum Society, v.14 no.1, 2005년, pp.17 - 23
임재원 (동북대학 다원물질과학연구소)
Glow discharge mass spectrometry(GDMS) was used to determine the impurity concentrations of the deposited Cu films and the 6N Cu target. Cu films were deposited on Si (100) substrates at zero substrate bias voltage and a substrate bias voltage of -50 V using a non-mass separated ion beam deposition ...
C. A. Chang and C. K. Hu, Appl. Phys. Lett. 57, 617 (1990)
M. O'Reilly, X. Jiang, J. T. Beechinor, S. Lynch, C. Ni Dheasuna, J. C. Patterson, and G. M. Grean, Appl. Surf. Sci. 91, 152 (1995)
M. Van Straaten, K. Swenters, R. Gijbels, J. Verlinden, and E. Adriaenssens, J. Anal. At. Spectrom. 9, 1389 (1994)
J. S. Becker and H. -J. Dietze, Spectrochim. Acta B 53, 1475 (1998)
R. K. Marcus, J. Anal. At. Spectrom. 8, 935 (1993)
T. E. Gibeau and R. K. Marcus, J. Anal. At. Spectrum. 13, 1303 (1998)
D. M. Wayne, R. K. Schulze, C. Maggiore, D. W. Cooke, and G. Havrilla, Appl. Spectrosc. 53, 266 (1999)
W. Schelles and R. V. Grieken, J. Anal. At. Spectorm. 12, 49 (1997)
C. Lazik and R. K. Marcus, Spectrochimica Acta. 48B, 1673 (1993)
W. Vieth and J. C. Huneke, Spcetrochimica Acta. 46B, 137 (1991)
P. Gregory, A. J. Bangay, and T. L. Bird, Metallurgia 71, 207 (1965)
J. W. Coburn and E. Kay, Appl. Phys. Lett. 18, 435 (1971)
E. E. Muschlitz, Science 159, 599 (1968)
D. R. Lide, Handbook of Chemistry and Physics (New York CRC press) pp. 10-207
T. Takagi, Thin Solid Films 92, 1 (1982)
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