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NTIS 바로가기한국공작기계학회논문집 = Transactions of the Korean society of machine tool engineers, v.15 no.6, 2006년, pp.71 - 75
이석우 (한국생산기술연구원) , 최병열 (한국생산기술연구원 e가공공정팀) , 강은구 (한국생산기술연구원 e가공공정팀) , 홍원표 (한국생산기술연구원 e가공공정팀) , 최헌종 (한국생산기술연구원 e가공공정팀)
The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process withou...
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Watanabe, K., Hoshino, T., Kodo, K., Kanda, K., Haruyama, Y., Kaito, T., Fujita, J., Ishida, M., Ochiai, Y., Tajima, T. and Matsui, S., 2004, 'Nanoimprint using three-dimensional microlens mold made by focused -ion-beam chemical vapor deposition,' J. Vac. Sci. Technol., B22(1), Jan/Feb, pp. 22-26
Kometani, R., Morita, T., Watanabe, K., Hoshino, T., Kondo, K., Kanda, K., Haruyama, Y., Kaito, T., Fujita, J., Ishida, M., Ochiai, Y. and Matsui, S., 2004, 'Manomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition,' J. Vac. Sci, Technol., B22(1), Jan/Feb, pp. 257-263
Fujita, J., Ishida, M., Ichihashi, T., Ochiai, Y., Kaito, T. and Matsui, S., 2003, 'Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties,' Nucl. Inst. and Methods in Physics Res., B206, pp. 472-477
Watanabe, K, Morita, T. and Kometani, R., 2004, 'Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition,' J. Vac. Sci. Technol., B22(1), pp. 22-26
Yamaguchi, H. Shimase, A., Haraichi, S. and Miyauchi, T., 1985, 'Characteristics of Silicon Removal by Fine Focused Gallium Ion Beam,' Journal of Vacuum Science and Technology B, Vol. 3, No. 1, pp. 71-74
Tseng, A. A, 2004, 'Recent developments in micromilling using focused ion beam technology,' J. Micromech. Microeng., Vol. 14, R15-R34
Choi, B. Y., Kang, E. G., Hong, W. P., Lee, S. W. and Choi, H. Z., 2005, 'Analysis on FIB Machining Process using the Taguchi Approach,' Proceedings of the KSMTE Autumn Conference, pp. 26-30
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