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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.23 no.3 = no.180, 2006년, pp.163 - 170
안현균 (한국기계연구원 나노공정장비연구센터) , 이학주 (한국기계연구원 나노공정장비연구센터) , 오충석 (금오공과대학교 기계공학부)
Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different front the corresponding bulk properties and thus there has been a s...
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Freund, L. B., Suresh S., 'Thin Film Materials,' Cambridge, 2003
Norton, R. L., 'Machine Design, Prentice Hall,' Ch. 2, 2000
Read, D. T., Dally, J. W., 'A New Method for Measuring the Strength and Ductility of Thin Films,' J. Mater. Res., Vol. 8, pp. 1542-1549, 1993
Oh, C.-S., Sharpe, W. N. Jr., 'Techniques for Measuring Mechanical Properties of Poly silicon using an ISDG,' J. of the KSPE, Vol. 27, No.7, pp. 171-178, 2004
Tsuchiya, T., Shikida, M., Sato, K., 'Tensile Testing System for Sub-micrometer Think Films,' Sensors & Actuators A, Vol. 97-98, pp. 492-496, 2002
Chasiotis, I., Knauss, W G., 'A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Froce Microscopy,' Exp. Mech., Vol. 42, pp. 51-57, 2002
Haque, M. A., Saif, M. T. A., 'Application of MEMS Force Sensors for in situ Mechanical Characterization of Nano-scale Thin Films in SEM and TEM,' Sensors & Actuators A, Vol. 97-98, pp. 239-245, 2002
Haque, M. A., Saif, M. T. A., 'In-situ Tensile Testing of Nano-scale Specimens in SEM and TEM,' Exp. Mech., Vol. 42, pp. 123-128, 2002
CATIA, V5R10, Dassault Systemes
http://www.wazau.com/en/sensors/druck_zug.html
http://www.cedrat.com/
Kim, S.-W., Oh, C.-S., Lee, H.-J., 'Effects of Specimen Alignment on the Mechanical Properties of Polysilicon Film,' MRS Symposium O81, 2005
Koester, D., Cowen, A., Mahadevan, R., Stonefield, M., Hardy, B., 'Poly MUMPs Design Handbook,' Rev. 10.0, MEMScAP, 2003
Sharpe, W. N. Jr., 'An Interferometric Strain/Displacement Measurement System,' NASA Technical Memorandum 101638, 1989
Sharpe, W.N. Jr., 'Mechanical Properties of MEMS Materials,' The MEMS Handbook, CRC Press, pp. 3-1 to 3-33, 2001
Oh, C.-S., Lee, H.-J., Ko, S.-G., Kim, S.-W, Ahn, H.-G., 'Comparison of the Young's Modulus of Polysilicon Film by Tensile Testing and Nanoindentation,' Sensors & Actuators A, Vol. 117, pp. 151-159, 2005
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