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NTIS 바로가기전기학회논문지 = The Transactions of the Korean Institute of Electrical Engineers, v.56 no.10, 2007년, pp.1782 - 1785
김봉석 (성균관대학 전자전기공학과) , 김응권 (성균관대학 전자전기공학과) , 이규일 (성균관대학 전자전기공학과) , 오수영 (성균관대학 전자전기공학과) , 송준태 (성균관대학 전자전기공학과)
In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using X...
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