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NTIS 바로가기대한산업공학회지 = Journal of the Korean Institute of Industrial Engineers, v.34 no.3, 2008년, pp.296 - 307
서정대 (경원대학교 산업정보시스템공학과)
A semiconductor production system has sophisticated manufacturing operations and needs high capital investment for its expensive equipment, which warrants efficient real-time flow control for wafers. In the bay, we consider material handling equipment that can handle multiple carriers of wafers. The...
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