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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.26 no.11 = no.224, 2009년, pp.47 - 54
Spin coaters are the essential instruments in micro-fabrication processes, which apply uniform thin films to flat substrates. In this research, a spin coater diagnosis system is developed to detect the abnormal operation of TFT-LCD process in real time. To facilitate the real-time data acquisition a...
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Chae, H. C., Ryu, I. C. and Han, C. S., "3-Dimensional Modeling and Sensitivity Analysis for Vibration Reduction of the Spin-Coater System," Journal of the Korean Society for Precision Engineering, Vol. 20, No. 2, pp. 209-217, 2003
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Samanta, B. and Al-Balushi, K. R., "Artificial Neural Network Based Fault Diagnostics of Rolling Element Bearings Using Time-Domain Features," Mechanical Systems and Signal Processing, Vol. 17, No. 2, pp. 317-328, 2003
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