[논문]Performance improvement of 2 stage GM-type pulse tube Cryocooler for cryopump

Park, Seong-Je; Koh, Deuk-Yong; Suh, Jeong-Kyoon

doi:10.9714/psac.2011.13.4.030

Performance improvement of 2 stage GM-type pulse tube Cryocooler for cryopump 원문보기

한국초전도·저온공학회논문지 = Superconductivity and cryogenics, v.13 no.4, 2011년, pp.30 - 35

Park, Seong-Je (Energy Systems Research Division, Korea Institute of Machinery & Materials) , Koh, Deuk-Yong (Energy Systems Research Division, Korea Institute of Machinery & Materials) , Suh, Jeong-Kyoon (Energy Systems Research Division, Korea Institute of Machinery & Materials)

Abstract ▼ AI-Helper

This paper describes experimental study and performance improvement of 2 stage Gifford-McMahon (G-M) type pulse tube cryocooler for cryopump. The objective of this study is to improve the efficiency of 2 stage pulse tube cryocooler for substituting 2 stage G-M cryocooler used in cryopump. The target cooling capacities are 5 W at 20 K and 35 W at 80 K for the $1^{st}$ and the $2^{nd}$ stage, respectively. These values are good cooling capacities for vacuum level in medium size ICP 200 cryopump. Design of the 2 stage pulse tube cryocooler is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program. In order to improve the performance of 2 stage pulse tube cryocooler, U-type pulse tube cryocooler is fabricated and connecting tubes are minimized for reducing dead volumes and pressure losses. Also, to get larger capacities, orifice valves and double inlet valves are optimized and the compressor of 6 kW is used. On the latest unit, the lowest temperatures of 2 stage pulse tube cryocooler are 42 K ($1^{st}$ stage) and 8.3 K ($2^{nd}$ stage) and the cooling capacities are 40 W at 82.9 K ($1^{st}$ stage) and 10 W at 20.5 K ($2^{nd}$ stage) with 6.0 kW of compressor input power. This pulse tube cryocooler is suited for commercial medium size cryopump. In performance test of cryopump with 2 stage pulse tube cryocooler, pumping speed for gaseous nitrogen is 4,300 L/s and the ultimate vacuum pressure is $7.5{\times}10^{-10}$ mbar.

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문제 정의

In this paper, research is focused on improving performance of 2 stage G-M type pulse tube cryocooler for cryopump application. The target cooling capacities of 2 stage pulse tube cryocooler are 5 W at 20 K and 35 W at 80 K for 1^st and 2^nd stage, respectively.

제안 방법

In order to validate the cryopump with 2 stage pulse tube cryocooler, tests were performed for pumping speed and ultimate pressure measurement of cryopump using nitrogen (type-II gas).
One was fine leak valve port for in-leaking test gas with CF flange, the second one was for high vacuum gauge such as ion gauge with CF25 flange and the third one was optional port for the residual feedthrough with CF flange. With this configuration, tests were performed to measure characteristics of cryopump like base pressure, cool-down time, pumping speed, ultimate vacuum pressure for nitrogen.

이론/모형

The tests for pumping speed measurement of nitrogen were carried out by constant pressure flow meter method. The standard volume flow rate of nitrogen in-leaked into vacuum chamber was measured by mass flow controller of Sierra.

성능/효과

(2) When the operating frequency of 2 stage pulse tube cryocooler was 2.2 Hz, the no load temperatures reached 42.0 K at the 1st stage cold end and 8.3 K at the 2^nd stage cold end, respectively.
(4) Maximum pumping speed of the cryopump for Nitrogen was 4,300 L/s and the ultimate vacuum pressure was below 7.5 × 10-10 mbar.

참고문헌 (12)

S.G.Gilankar and P.K.Kush, "Performance of indigeniosly developed closed cycle refrigerator based cryopump," Proc. National Symp. on vacuum science & technology and its application to plasmas, pp. 157-160, 2005.
C. Wang, "Efficient 10 K Pulse Tube Cryocoolers," Cryocoolers 13, Plenum Publishing Corp., New York, pp. 133-140, 2005.
W.W. Burt and C.K. Chan, "New mid-size high efficiency pulse tube coolers," Cryocoolers 9, Plenum Publishing Corp., New York, pp. 173-182, 1997.
W.E. Gifford and R.C. Longsworth, "Pulse-tube refrigeration," Trans. ASME: J Eng Ind Series B 86, pp.264-268, 1964.

상세보기
E.I. Mikulin et al., "Low temperature expansion pulse tubes," Adv. Cryo. Eng. Vol. 29, pp. 629, 1984.
Radebaugh, R., Zimmerman, J., Smith, D. R., and Louie, B., "A comparison of three types of pulse tube refrigerators: new methods for reaching 60K," Adv. Cryogenic Engineering, vol. 31, pp. 779, 1986.
S.W. Zhu, P.Y. Wu and Z.Q. Chen, "Double inlet pulse tube refrigerators: an important improvement," Cryogenics 30, pp. 514-520, 1990.

상세보기
A. Ravex, I. Charles, L. Duband and J.M. Poncet, "Pulse tube development at CEA/SBT," Proc. of the IIR Conf., Sidney, Sept. 1999.
S.G.Gilankar and P.K.Kush, "Performance of indigeniosly developed closed cycle refrigerator based cryopump," Proc. National Symp. on vacuum science & technology and its application to plasmas, pp. 157-160, 2005.
A.Hofmann, "Instructions for Using the Numeric Code FZKPTR for the design of Pulse Tube Cooler," Institute fur Technische Physik, 출처, 2003.
S.J.Park, etc., "Experimental research on 2 stage GM-type pulse tube refrigerator for cryopump," Superconductivity and Cryogenics, Vol. 12, pp. 29-33, 2010.
Re H.B.Kim, J.H.Park, "Research on fast cool-down of orifice pulse tube refrigerator by controlling orifice valve opening," Superconductivity and Cryogenics, vol. 12, pp. 36-40, 2010.

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Performance improvement of 2 stage GM-type pulse tube Cryocooler for cryopump 원문보기

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Performance improvement of 2 stage GM-type pulse tube Cryocooler for cryopump 원문보기

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