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NTIS 바로가기한국정보통신학회논문지 = Journal of the Korea Institute of Information and Communication Engineering, v.19 no.6, 2015년, pp.1393 - 1398
강성준 (Department of Electrical&Semiconductor Engineering, Chonnam National University) , 정양희 (Department of Electrical&Semiconductor Engineering, Chonnam National University)
In this study, the electrical and optical properties of GZO (Ga-doped ZnO) thin films prepared on PES substrates by RF magnetron sputtering method with various working pressures (5 to 20 mTorr) were investigated. All GZO thin films exhibited c-axis preferential growth regardless of working pressure,...
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