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NTIS 바로가기한국표면공학회지 = Journal of the Korean institute of surface engineering, v.52 no.4, 2019년, pp.211 - 226
Optical thin films were deposited by using a reactive pulsed DC magnetron sputtering method with a high density plasma(HDP). In this study, the effect of sputtering process conditions on the microstructure and optical properties of
핵심어 | 질문 | 논문에서 추출한 답변 |
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기계적 내구성이 떨어지는 MgF2를 대체할 수 있는 물질은? | 38의 매우 낮은 굴절률을 갖는 MgF2가 있지만 상기 물질은 외부환경에 민감하여 기계적 내구성이 떨어진다 는 단점이 있다. 따라서 1.46의 다소 높은 굴절률을 갖지만 유리 기판에 증착이 용이하고 외부 환경에 대해 우수한 내구성을 가지는 SiO2를 사용하는 것이 일반적이다. SiO2 박막은 200 ~ 4500 nm의 매우 넓은 투과 파장 범위를 나타내며 광의 흡수율과 굴절률이 낮아서 다층 구조의 광학 박막에 많이 사용되는 물질이다. | |
다층 반사방지막의 특징은? | 다층 반사방지막의 저굴절률 물질로는 1.38의 매우 낮은 굴절률을 갖는 MgF2가 있지만 상기 물질은 외부환경에 민감하여 기계적 내구성이 떨어진다 는 단점이 있다. 따라서 1. | |
반사방지막의 응용분야는? | 최근 광학 및 광통신, 디스플레이 기술 등의 발전으로 모바일 전자기기, 가전제품, 자동차, 센서와 같은 응용분야들이 다양해짐에 따라 광학박막의 설계, 증착 기술 및 측 정 기술의 발전이 함께 요구되고 있다. 광학박막에는 자외선과 가시광선 영역의 빛은 차단하고 적외선 영역의 빛만을 투과시키는 장파장 투과 필터, 특정 파장의 빛만을 투과시키는 협대역투과필터, 표 면에서의 반사율을 높여주는 고반사 코팅, 빛의 반 사를 줄이고 투과를 높이는 반사방지막들이 있으며 [1], 특히 반사방지막은 디스플레이, 광학기기, 태양 전지, 건축 등 가장 넓은 분야에서 응용되어지고 있다. |
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