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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.20 no.4, 2021년, pp.157 - 160
김기락 (가천대학교 전자공학과) , 조의식 (가천대학교 전자공학과) , 권상직 (가천대학교 전자공학과)
As an insulator for a thin film transistor(TFT) and an encapsulation material of organic light emitting diode(OLED), aluminum oxide (Al2O3) has been widely studied using several technologies. Especially, in spite of low deposition rate, atomic layer deposition (ALD) has been used as a process method...
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