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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.20 no.2, 2021년, pp.61 - 66
윤지섭 (한국세라믹기술원) , 최재호 (한국세라믹기술원) , 정윤성 (한국세라믹기술원) , 민경원 (한국세라믹기술원) , 임원빈 (한양대학교 신소재공학과) , 김형준 (한국세라믹기술원)
In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transi...
Park, E. K., Lee, H -K. (2020), "Fabrication of Plasma Resistance Y 2 O 3 -Al 2 O 3 -SiO 2 Coating Ceramics by Melt-Coating Methods", Korea J. Mater. Res, Vol. 30, No. 7.
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Choi, J. H., Park, H, B., Na, H., & Kim, H. -J. (2019), "Plasma corrosion resistance of RO-Al 2 O 3 -SiO 2 (R: Alkaline earth) under fluorocarbon plasma with Ar+: II. Plasma resistant glass", Corrosion Science, 146, 247-253.
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