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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.1, 2023년, pp.64 - 71
변영민 (한국세라믹기술원) , 최재호 (한국세라믹기술원) , 임원빈 (한양대학교 신소재공학과) , 김형준 (한국세라믹기술원)
In this study, we investigated the effects of BiAlSiO glass composition on its glass forming range, thermal properties, and plasma resistance. The results showed that increasing the Al2O3 content suppressed the tendency for crystallization and hindered glass formation beyond a certain threshold. Bi2...
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