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NTIS 바로가기전기전자학회논문지 = Journal of IKEEE, v.25 no.3, 2021년, pp.467 - 472
Stable operation of semiconductor devices is needed even at high temperatures. Among the structures of semiconductor devices, the area that can cause unstable electrical responses at high temperatures is the contact layer between the metal and the semiconductor. In this study, the effect of annealin...
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