최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.4, 2022년, pp.59 - 64
안일균 (한국공학대학교 IT반도체융합공학과) , 허헌 (한국공학대학교 메카트로닉스공학과) , 김효영 (한국공학대학교 메카트로닉스공학과) , 김기현 (한국공학대학교 메카트로닉스공학과)
Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficien...
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