최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.4, 2022년, pp.132 - 137
박지원 (한국기술교육대학교 메카트로닉스공학과) , 딘 후사무드 (한국기술교육대학교 메카트로닉스공학과) , 이병렬 (한국기술교육대학교 메카트로닉스공학부)
In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different...
Bahari, J., Feng, R., & Leung, A. M. "Robust MEMS gyroscope based on thermal principles.", microelectromechanical systems, 23(1), pp.100-116, 2013.
Benser, E. T. "Trends in inertial sensors and applications.", IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, pp. 1-4, 2015.
Ahmad, N., Ghazilla, R. A. R., Khairi, N. M., & Kasi, V. "Reviews on various inertial measurement unit (IMU) sensor applications.", International Journal of Signal Processing Systems, 1(2), pp.256-262, 2013.
Wang, S., Al Farisi, M. S., Tsukamoto, T., & Tanaka, S. "Roll/pitch rate integrating mems gyroscope using dynamically balanced dual-mass resonator.", IEEE International Symposium on Inertial Sensors and Systems, pp. 1-4, 2020.
Perlmutter, M., & Robin, L. "High-performance, low cost inertial MEMS: A market in motion!", In Proceedings of the 2012 IEEE/ION Position, Location and Navigation Symposium, pp. 225-229, 2012.
Passaro, V. M., Cuccovillo, A., Vaiani, L., De Carlo, M., & Campanella, C. E. "Gyroscope technology and applications: A review in the industrial perspective.", Sensors, 17(10), 2284, 2017.
Tatar, E., Alper, S. E., & Akin, T. "Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes.", Microelectromechanical Systems, 21(3), pp. 656-667, 2012.
Cao, H., Li, H., Kou, Z., Shi, Y., Tang, J., Ma, Z., Shen, C., Liu, J. "Optimization and experimentation of dual-mass MEMS gyroscope quadrature error correction methods.", Sensors, 16(1), 71, 2016.
Din, H., Iqbal, F., & Lee, B. "Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics.", Micromachines, 11(12), 1030, 2020.
Din, H., Iqbal, F., & Lee, B., "Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope.", Micromachines, 12(8), 902, 2021.
Din, H., Iqbal, F., & Lee, B. "Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity.", Sensors and Actuators A: Physical, 332, 113145, 2021.
Din, H., Iqbal, F., & Lee, B., "Modelling and optimization of single drive 3-axis MEMS gyroscope", Microsystem Technologies, 26(9), pp. 2869-2877, 2020.
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.