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LIME을 활용한 준지도 학습 기반 이상 탐지 모델: 반도체 공정을 중심으로
Anomaly Detection Model Based on Semi-Supervised Learning Using LIME: Focusing on Semiconductor Process 원문보기

Journal of Korean Society of Industrial and Systems Engineering = 한국산업경영시스템학회지, v.45 no.4, 2022년, pp.86 - 98  

안강민 (한양대학교 일반대학원 경영컨설팅학과) ,  신주은 (한양대학교 일반대학원 경영컨설팅학과) ,  백동현 (한양대학교 경상대학 경영학부)

Abstract ▼ AI-Helper 아이콘AI-Helper

Recently, many studies have been conducted to improve quality by applying machine learning models to semiconductor manufacturing process data. However, in the semiconductor manufacturing process, the ratio of good products is much higher than that of defective products, so the problem of data imbala...

주제어

#Semiconductor Fabrication Process   #SMOTE   #RFECV   #Anomaly Detection   #LIME  

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