[논문]생물학적 분석용 IMI 하이브리드 다중레이어 구조 기반 성능 향상된 표면 플라즈몬 공명 센서의 설계 및 특성 분석

송혜린; 안희상; 김규정

doi:10.3807/kjop.2022.33.4.177

생물학적 분석용 IMI 하이브리드 다중레이어 구조 기반 성능 향상된 표면 플라즈몬 공명 센서의 설계 및 특성 분석
Design and Evaluation of IMI Multilayer Hybrid Structure-based Performance Enhanced Surface Plasmon Resonance Sensor for Biological Analysis 원문보기

한국광학회지 = Korean journal of optics and photonics, v.33 no.4, 2022년, pp.177 - 186

송혜린 (부산대학교 인지메카트로닉스공학과) , 안희상 (부산대학교 인지메카트로닉스공학과) , 김규정 (부산대학교 인지메카트로닉스공학과)

초록
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표면 플라즈몬 공명 센서에서 센서의 성능은 민감도(nm/RIU)와 분해능인 공명 픽의 형태에 의해서 결정된다. 이러한 특성은 센서에 활용되는 구조체의 물질과 구조적 특성에 따라 달라진다. 본 연구에서는 insulator-metal-insulator (IMI) 다중 층 구조를 기반으로 한 표면 플라즈몬 공명 센서 구조의 최적화 과정을 통해 센싱 레이어의 굴절률 변화에 대한 높은 민감도 달성과 동시에 좁은 full width at half maximum (FWHM)과 픽의 깊이 이 두 가지의 요소를 기반으로 한 분해능이 큰 공명 픽을 형성하도록 하는 구조를 찾았다. 이 구조를 통해 센싱 레이어의 굴절률이 1.45-1.46 범위에서 변화할 때 FWHM = 11.92 nm, 픽 깊이 93.1%의 공명 픽이 형성되었고 최대 8,390 nm/RIU의 민감도 성능을 확인했다. 특히 금 박막을 활용한 파장 기반의 표면 플라즈몬 센서는 공명 픽의 너비 확장이 발생하나 금 박막을 사용하고도 좁은 FWHM을 달성함에 의의가 있다. 본 연구에서 제안하는 다중 층 설계를 기반으로 한 센서는 미세한 굴절률 변화 값에 대한 높은 민감도와 더불어 높은 분해능을 가지는 파장 기반 표면 플라즈몬 센서로 활용 가능하다.

Abstract ▼ AI-Helper

The performance of a surface plasmon resonance sensor is evaluated based on the sensitivity (nm/RIU) and sharpness from the full width at half maximum (FWHM) and the peak depth of a resonance peak. These factors are determined by the materials and conformational properties of the sensing structure. In this paper, we investigated an optimized insulator-metal-insulator (IMI) multilayer-based surface plasmon resonance sensor structure to simultaneously achieve high sensitivity, narrow FWHM, and deep peak depth while using gold for the metallic film layer which occurs peak broadening. By adopting the optimized structure, sensitivity of 8,390 nm/RIU, FWHM of 11.92 nm, and a resonance peak depth of 93.1% were achieved for 1.45-1.46 refractive index variation of the sensing layer. With the suggested structure conformation, high sensitivity and resolution of sensing performance can be achieved.

주제어

표/그림 (7)

$Fig. 1. Schematic image of optical setup with designed multilayers and working principle of surface plasmon resonance (SPR) system. (a) A schematic image of multilayer SPR sensor setup. Thicknesses of the layers in multilayers are indicated as tm, td, and ts which are the thicknesses of the metal film, the dielectric layer, and the sensing layer, respectively. The refractive indices of the layers are represented as nm, nd, and ns in the same order as described above. (b) Working principle of SPR sensor. (b), (c) and (d) are the prime factors for evaluating sensing performance. L, lens; M, mirror; Pol, polarizer.$ 그림 Fig. 1. Schematic image of optical setup with designed multilayers and working principle of surface plasmon resonance (SPR) system. (a) A schematic image of multilayer SPR sensor setup. Thicknesses of the layers in multilayers are indicated as t_m, t_d, and t_s which are the thicknesses of the metal film, the dielectric layer, and the sensing layer, respectively. The refractive indices of the layers are represented as n_m, n_d, and n_s in the same order as described above. (b) Working principle of SPR sensor. (b), (c) and (d) are the prime factors for evaluating sensing performance. L, lens; M, mirror; Pol, polarizer.
$Fig. 2. The performance evaluation of the designed sensor depends on the gold film thickness. (a) Full width at half maximum (FWHM) and Rmax - Rmin. (b) Sharpness factor (SF) of the resonance peaks obtained from reflectance spectra with the diverse thicknesses of metallic film layer. (c) Sensitivity (S) and (d) combined sensitivity factor (CSF) from reflectance spectra depending on the diverse thicknesses of metal film layer. The inset graph in (c) shows the reflectance spectra when the thickness of metallic film layer is 55 nm and the refractive index of sensing layer varies from 1.33 to 1.40 (green solid line: ns =1.33, blue dotted line: ns = 1.40).$ 그림 Fig. 2. The performance evaluation of the designed sensor depends on the gold film thickness. (a) Full width at half maximum (FWHM) and R_max - R_min. (b) Sharpness factor (SF) of the resonance peaks obtained from reflectance spectra with the diverse thicknesses of metallic film layer. (c) Sensitivity (S) and (d) combined sensitivity factor (CSF) from reflectance spectra depending on the diverse thicknesses of metal film layer. The inset graph in (c) shows the reflectance spectra when the thickness of metallic film layer is 55 nm and the refractive index of sensing layer varies from 1.33 to 1.40 (green solid line: n_s =1.33, blue dotted line: n_s = 1.40).
그림 Fig. 3. The performance evaluation of the designed sensor depends on the thickness of the dielectric layer. (a) Full width at half maximum (FWHM) of the resonance peaks and the wavelengths of resonance peak position depending on t_d. (b) The peak depths (R_max - R_min) are indicated as black dots and calculated sharpness factors (SFs) are represented as red triangles depending on t_d. (c) Sensitivity of the designed system when t_m = 50 nm, t_d ranges from 200 to 850 nm and n_s varies from 1.40 to 1.50. (d) Calculated combined sensitivity factor (CSF).
$Fig. 4. The reflectance spectra are presented in the contour map depending on the wavelength and ns when td is 350 nm and ts (thickness of sensing layer) is (a) 600 nm and (b) 1,000 nm. The reflectance spectra with the sensing layer of which refractive indices are in the range from 1.44 to 1.5 in the case that ts is (b) 600 nm and (d) 1,000 nm.$ 그림 Fig. 4. The reflectance spectra are presented in the contour map depending on the wavelength and n_s when t_d is 350 nm and t_s (thickness of sensing layer) is (a) 600 nm and (b) 1,000 nm. The reflectance spectra with the sensing layer of which refractive indices are in the range from 1.44 to 1.5 in the case that t_s is (b) 600 nm and (d) 1,000 nm.
표 Table 1. Calculated sensitivities of the designed multilayer structures which have t_d = 350 nm and t_s in the range from 200 nm to 1,000 nm. The sensitivity is calculated with the obtained resonance peak wavelength when n_s varies from n_s1 to n_s2
$Fig. 5. The reflectance spectra are presented in the contour map depending on the wavelength and ns when td is 400 nm and ts is (a) 600 nm and (c) 1,000 nm. The reflectance spectra with the sensing layer of which refractive indices are in the range from 1.45 to 1.5 when ts is (b) 600 nm and (d) 1,000 nm.$ 그림 Fig. 5. The reflectance spectra are presented in the contour map depending on the wavelength and n_s when t_d is 400 nm and t_s is (a) 600 nm and (c) 1,000 nm. The reflectance spectra with the sensing layer of which refractive indices are in the range from 1.45 to 1.5 when t_s is (b) 600 nm and (d) 1,000 nm.
표 Table 2. Calculated sensitivities of the designed sensors which have t_d = 400 nm and t_s in the range from 200 nm to 1,000 nm. The sensitivity is calculated with the obtained resonance peak wavelength when n_s varies from n_s1 to n_s2

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