참고문헌 (16)

1. J. So, E. Choi, J.T. Kim, J.S. Shin, J.B. Song, M. Kim, C.W. Chung, J.Y. Yun, "Improvement of plasma resistance of anodic aluminum-oxide film in sulfuric acid containing cerium (IV) ion", Coatings, Vol. 10, pp. 103-112, 2020. 

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2. M. Kim, E. Choi, J. So, J.-S. Shin, C.-W. Chung, S. Maeng, J.-Y. Yun, "Improvement of corrosion properties of plasma in an aluminum alloy 6061-T6 by phytic acid anodization temperature", J. Mater. Res. Technol, Vol. 11, pp. 219-226, 2021. 

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3. J. So, J. Yun, J. Shin, "Plasma Corrosion and Breakdown Voltage Behavior of Ce Ion Added Sulfuric Acid Anodizing According to Electrolyte Temperature", J. Semicond. Disp. Technol., Vol. 20, pp. 37-41, 2021. 

4. J. So, J. Yun, J. Shin, "Contamination particle and cracking behavior of the anodic oxidation in sulfuric acid containing cerium salt", J. Semicond. Disp. Technol., Vol. 17, pp. 11-15, 2018. 

5. H. Ashizawa, K. Yoshida, "Effect of the microstructures of yttria ceramics on their plasma corrosion behavior", Ceram. Int, Vol. 45, pp. 21162-21167, 2019. 

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6. H. Kwon, Y. Kim, H. Park, C. Lee, "The importance of intimate inter-crystallite bonding for the plasma erosion resistance of vacuum kinetic sprayed Y2O3 coating", Surf. Coatings Technol, Vol. 374, pp. 493-499, 2019. 

7. T.K. Lin, W.K. Wang, S.Y. Huang, C.T. Tasi, D.S. Wuu, "Comparison of erosion behavior and particle contamination in mass-production CF4/O2 plasma chambers using Y2O3 and YF3 protective coatings", Nanomaterials, Vol. 7, pp. 183-191, 2017. 

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8. J.B. Song, J.T. Kim, S.G. Oh, J.Y. Yun, "Contamination particles and plasma etching behavior of atmospheric plasma sprayed Y2O3 and YF3 coatings under NF3 plasma", Coatings, Vol. 9, pp.1-8, 2019. 

9. H. Ashizawa, K. Yoshida, "Plasma-resistance evaluation of yttrium oxyfluoride coating prepared by aerosol deposition method", Int. J. Appl. Ceram. Technol, Vol. 19, pp. 375-382, 2022. 

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10. W.K. Wang, S.Y. Wang, K.F. Liu, P.C. Tsai, Y.H. Zhang, S.Y. Huang, "Plasma etching behavior of SF6 plasma Pre-treatment sputter-deposited yttrium oxide films", Coatings, Vol. 10, pp. 1-9, 2020. 

11. V. Swamy, H.J. Seifert, F. Aldinger, "Thermodynamic properties of Y2O3 phases and the yttrium-oxygen phase diagram", J. Alloys Compd., Vol. 269, pp. 201-207, 1998. 

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12. J.L. Caslavsky, D.J. Viechnicki, "Melting behaviour and metastability of yttrium aluminium garnet (YAG) and YAlO3 determined by optical differential thermal analysis", J. Mater. Sci., Vol. 15, pp. 1709-1718, 1980. 

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13. P.E. Rosenberg, "Stability relations of aluminum hydroxy-fluoride hydrate, a ralstonite-like mineral, in the system AlF3-Al2 O3-H2O-HF", Can. Mineral, Vol. 44, pp. 125-134, 2006. 

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14. V. Swamy, N.A. Dubrovinskaya, L.S. Dubrovinsky, I. Introduction, "High-temperature powder x-ray diffraction of yttria to meting point", J. Mater. Res., Vol. 14, pp. 456-459, 1999. 

15. J.-B. Song, E. Choi, S.-G. Oh, J.-T. Kim, J.-Y. Yun, "Contamination Particle Behavior of Aerosol Deposited Y2O3 and YF3 Coatings under NF3 Plasma", Coatings, Vol. 9, pp. 310-319, 2019. 

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16. J.B. Song, J.T. Kim, S.G. Oh, J.S. Shin, J.R. Chun, J.Y. Yun, "Effect of sealing time of anodic aluminum oxide (AAO) film for preventing plasma damage", Sci. Adv. Mater, Vol. 7, pp. 127-132, 2015. 

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