[논문]마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구

민창흠; 최두호

doi:10.5695/jsse.2022.55.5.284

[국내논문] 마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구
ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering 원문보기

한국표면공학회지 = Journal of the Korean institute of surface engineering, v.55 no.5, 2022년, pp.284 - 291

Abstract ▼ AI-Helper

Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.

표/그림 (6)

$Fig. 1. (a) Schematic ZnO/Cu/Al2O3 transparent heater fabricated onto a glass substrate. (b) θ-2θ X-ray diffraction scan for the ZnO/Cu/Al2O3. (c) Scanning electron microscopy micrograph for the 8.5 nm-thick Cu layer.$ 그림 Fig. 1. (a) Schematic ZnO/Cu/Al₂O₃ transparent heater fabricated onto a glass substrate. (b) θ-2θ X-ray diffraction scan for the ZnO/Cu/Al₂O₃. (c) Scanning electron microscopy micrograph for the 8.5 nm-thick Cu layer.
그림 Fig. 2. (a) Visible light transmittance for the ZnO (30 nm)/Cu (8.5 nm)/Al₂O₃ (0-100 nm) transparent heaters. (b) (upper panel) Summary of average and maximum transmittances and (lower panel) transmittance values corresponding to the incident photon wavelengths of 400 nm (blue), 600 nm (green) and 800 nm (red), respectively.
그림 Fig. 3. (a) Visible light transmittance for the ZnO (0-50 nm)/Cu (8.5 nm)/Al₂O₃ (90 nm) transparent heaters. (b) (upper panel) Summary of average and maximum transmittances and (lower panel) transmittance values corresponding to the incident photon wavelengths of 400 nm (blue), 600 nm (green) and 800 nm (red), respectively.
그림 Fig. 4. (a) Visible light transmittance for the ZnO (30 nm)/Cu (5-19 nm)/Al₂O₃ (90 nm) transparent heaters. (b) Sheet resistance as a function of Cu layer thickness in the range of 5-19 nm.
그림 Fig. 5. (a) Temperatures for the ZnO (30 nm)/Cu (8.5 nm)/Al₂O₃ (90 nm) and ZnO (30 nm)/Cu (19 nm)/Al₂O₃ (90 nm) transparent heaters with increasing applied voltage with an interface of 2 V. Each applied bias was maintained for 6 min. Infrared camera images captured at each applied bias are given on top. (b) The relations of current-voltage, temperature-voltage and powervoltage are extracted from Fig. 4(a). (c) The heaters were repeatedly turned on for 6 min by applying 5 V and turned off for 6 min, which exhibited excellent thermal reproducibility.
그림 Fig. 6 (a) Temperatures and currents for the the ZnO (30 nm)/Cu (8.5 nm)/Al₂O₃ (90 nm) and ZnO (30 nm)/Cu (19 nm)/Al₂O₃ (90 nm) transparent heaters with a fixed applied voltage of 5 V. (b) Visible light transmittance measured for the two transparent heaters before and after the heating test in Fig. 6(a).

참고문헌 (21)

Z. Chen, W. Li, R. Li, Y. Zhang, G. Xu, H. Cheng, Fabrication of highly transparent and conductive indium-tin oxide thin films with a high figure of merit via solution processing, Langmuir, 29 (2013) 13836-13842.

상세보기
X. Guo, X. Liu., F. Lin, H. Li, Y. Fan, N. Zhang, Highly conductive transparent organic electrodes with multilayer structures for rigid and flexible optoelectronics, Sci. Rep., 5 (2015) 10569.

상세보기
K. Im, K. Cho, J. Kim, S. Kim, Transparent heaters based on solution-processed indium tin oxide nanoparticles, Thin Solid Films, 518 (2010) 3960-3963.

상세보기
D. T. Papanastasiou, A. Schultheiss, D. M. Rojas, C. Celle, A. Carella, J. P. Simonato, D. Bellet, Transparent heaters: A review, Adv. Funct. Mater., 30 (2020) 1910225.

상세보기
R. Gupta, K. D. M. Rao, S. Kiruthika, G. U. Kulkarni, Visibly transparent heaters, ACS Appl. Mater. & Interf., 8 (2016) 12559-12575.
S. Hong, H. Lee, J. Lee, J. Kwon, S. Han, Y. D. Suh, H. Cho, J. Shin, J. Yeo, S. H. Ko, Highly stretchable and transparent metal nanowire heater for wearable electronics applications, Adv. Mater., 27 (2015) 4744-4751.
D. Sui, Y. Huang, L. Huang, J. Liang, Y. Ma, Y. Chen, Flexible and transparent electrothermal film heaters based on graphene materials, Small, 7 (2011) 3186.

상세보기
Y. H. Yoon, J. W. Song, D. Kim, J. Kim, J. K. Park, S. K. Oh, C. S. Han, Transparent film heater using single-walled carbon nanotubes, Adv. Mater., 19 (2007) 4284-4287.

상세보기
D. Lee, G. Bang, M. Byun, D. Choi, Highly flexible, transparent and conductive ultrathin silver film heaters for wearable electronics applications, Thin Solid Films, 697 (2020) 137835.

상세보기
G. Bang, D. Choi, Simultaneous improvement in the corrosion resistance and visible transparency of ZnO/Cu/ZnO transparent heaters with reactively sputtered Al 2 O 3 layers, Korean J. Met. Mater., 59 (2021) 155-161.
J. Choi, D. Choi, Fabrication of semitransparent W film heaters via phase transformation, Korean J. Met. Mater., 59 (2021) 664-669.

상세보기
T. Lee, D. Kim, M. E. Suk, G. Bang, J. Choi, J. S. Bae, J. H. Yoon, W. J. Moon, D. Choi, Regulating Ag wettability via modulating surface stoichiometry of ZnO substrates for flexible electronics, Adv. Funct. Mater., 31 (2021) 2104372.

상세보기
J. Choi, G. Bang, T. Lee, V. T. B. Tran, J. S. Bae, D. Choi, Simultaneous enhancement in visible transparency and electrical conductivity via the physicochemical alterations of ultrathin-silver-film-based transparent electrodes, Nano Letters, 22 (2022) 3133-3140.

상세보기
C. Ji, D. Liu, C. Zhang, L. J. Guo, Ultrathin-metal-film-based transparent electrodes with relative transmittance surpassing 100%, Nat. Commun., 11 (2020) 3367.

상세보기
Z. Balevicius, A. Paulauskas, I. Plikusiene, L. Mikoliunaite, M. Bechelany, A. Popov, A. Ramanavicius, A. ramanaviciene, Towards the application of Al 2 O 3 /ZnO nanolaminates in immunosensors: total internal reflection spectroscopic ellipsometry based evaluation of BSA immobilization, J. Mater. Chem. C, 6 (2018) 8778-8783.
J. Yun, Ultrathin metal films for transparent electrodes of flexible optoelectronic devices, Adv. Funct. Mater., (2017) 1606641.
D. E. Aspnes, Optical properties of thin films, Thin Solid Films, 89 (1982) 249-262.

상세보기
T. Sun, B. Yao, A. P. Warren, K. Barmak, M. F. Toney, R. E. Peale, K. R. Coffey, Dominant role of grain boundary scattering in the resistivity of nanometric Cu films, Phys. Rev. B, 79 (2009) 041402.
D. Lee, D. Choi, Highly thermostable ultrathin planar Ag transparent heaters, Microelectron. Eng., 251 (2022) 111658.

상세보기
C. V. Thompson, Solid-state dewetting of thin solid films, Annu. Rev. Mater. Res., 42 (2012) 399-434.
S. M. Lee, J. H. Kwon, S. Kwon, K. C. Choi, A review of flexible OLEDs toward highly durable unusual displays, IEEE Trans. Elect. Dev., 64 (2017) 1922-1931.

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[국내논문] 마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구
ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering 원문보기

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[국내논문] 마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구 ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering 원문보기

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[국내논문] 마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구
ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering 원문보기

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