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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.36 no.2, 2023년, pp.99 - 108
주정아 (울산과학기술원 반도체소재부품대학원) , 박진구 (울산과학기술원 반도체소재부품대학원) , 서준기 (울산과학기술원 반도체소재부품대학원) , 정홍식 (울산과학기술원 반도체소재부품대학원)
Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by ...
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