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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.2, 2023년, pp.96 - 103
조윤성 (명지대학교 전기공학과) , 최현준 (명지대학교 전자공학과) , 전상민 (명지대학교 전기공학과) , 신지훈 (명지대학교 전기공학과) , 이재영 (명지대학교 전기공학과) , 이범주 (명지대학교 전기공학과) , 손영익 (명지대학교 전기공학과)
This paper presents a robust position tracking controller for a motor used in semiconductor equipment, utilizing the motor angle measurement. Precise position control is challenging due to the presence of uncertainties in various motor applications. The proposed controller consists of a PD (Proporti...
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