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NTIS 바로가기마이크로전자 및 패키징 학회지 = Journal of the Microelectronics and Packaging Society, v.30 no.2, 2023년, pp.65 - 70
박태완 (부경대학교 재료공학과) , 김승민 ((주)라노엠 R&D 센터) , 강은빈 (부경대학교 재료공학과) , 박운익 (부경대학교 재료공학과)
Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL tec...
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