[논문]반도체 다이싱 공정에서 발생하는 실리콘 슬러지를 재활용한 실리카 나노입자의 제조 및 전기감응형 유체로의 응용

추연룡; 제갈석; 김지원; 김하영; 김찬교; 사민기; 심형섭; 윤창민

doi:10.17137/korrae.2023.31.3.15

반도체 다이싱 공정에서 발생하는 실리콘 슬러지를 재활용한 실리카 나노입자의 제조 및 전기감응형 유체로의 응용
Preparation of Silica Nanoparticles via Recycling of Silicon Sludge from Semiconductor Dicing Process and Electro-responsive Smart Fluid Application 원문보기

유기물자원화 = Journal of the Korea Organic Resources Recycling Association, v.31 no.3, 2023년, pp.15 - 25

추연룡 (한밭대학교 화학생명공학과) , 제갈석 (한밭대학교 화학생명공학과) , 김지원 (한밭대학교 화학생명공학과) , 김하영 (한밭대학교 화학생명공학과) , 김찬교 (한밭대학교 화학생명공학과) , 사민기 (한밭대학교 화학생명공학과) , 심형섭 (세종대학교 항공우주공학과) , 윤창민 (한밭대학교 화학생명공학과)

초록
AI-Helper

본 연구에서는 반도체 패키지 다이싱 공정에서 발생하는 실리콘 슬러지를 재활용하여 실리카 나노입자를 제조하였으며 이를 전기감응형 스마트유체의 분산 물질로 적용하였다. 상세히는, 실리콘 슬러지에 산처리를 통해 금속불순물을 제거한 고순도의 실리콘 분말을 얻고, 수열합성법을 통해 실리카 나노입자를 합성하였다. 실리카 나노입자의 크기를 조절하기 위해 수열합성법의 반응시간을 8, 15, 20, 30시간으로 진행하였으며, 반응시간이 증가할수록 실리카 나노입자의 크기가 증가하였다. 수열합성의 반응시간이 길어질수록 실리콘의 가수화 및 탈수 반응이 증가하며 입자의 크기를 증가시킨다. 실리콘 슬러지에서 제조한 실리카 나노입자를 실리콘 오일에 분산하여 전기감응형 스마트유체로 응용하였다. 그 결과, 30시간의 수열합성으로 제조된 실리카 나노입자가 동일한 전기장 하에서 21.4Pa의 가장 높은 전단응력을 나타내었다. 이는 큰 실리카 나노입자의 사이에 작은 입자들이 배치되는 보강효과 효과를 통해 단단한 사슬구조의 형성 때문이다. 본 연구를 통해 반도체 다이싱 공정에서 발생하는 실리콘 슬러지를 성공적으로 재활용하여 실리카 나노입자를 제조하였고, 이를 전기감응형 스마트유체에 적용함으로써 산업현장에서 친환경성을 강조하는 ESG 경영의 일환으로 적용될 수 있음을 확인하였다.

Abstract ▼ AI-Helper

In this study, silicon sludge from semiconductor dicing process is recycled to fabricate silica nanoparticles, which are applied as dispersing materials for electro-responsive (ER) smart fluid. In specific, metal impurities are removed from silicon sludge by acid washing to obtain the high-purity silicon powder. And then, silica nanoparticles are synthesized by facile hydrothermal method employing the silicon powder as reactant material. To control the size of silica nanoparticles, the reaction time of hydrothermal method is varied as 8, 15, 20, and 30 hours are applied to control the size of silica nanoparticles. Sizes of silica nanoparticles are increased proportionally to the reaction time owing to the increased numbers of hydrolysis and condensation reactions. As-synthesized silica nanoparticles are prepared as electro-responsive smart fluids by dispersing into silicon oil. Silica nanoparticles synthesized by 30 hours of hydrothermal reaction (SiO2-H30) exhibit the highest shear stress of 21.4 Pa under an applied electric field strength of 3.0kV mm-1. Such enhancement in ER performance of SiO2-H30 among various silica nanoparticles are attribute to the reinforcing effect originated from the mixed particle size, which allowing the formation of rigid chain-like structures. Accordingly, this study successfully propose a recycling method of silicon sludge to synthesize silica nanoparticles and their derived ER fluids, which may suggest new possibility to ESG management emphasizing the eco-friendliness.

주제어

표/그림 (5)

그림 Fig. 1. Schematic illustration for the procedure of recycling silica sludge wastes from wafer dicing process to fabricate silica nanoparticles according to the hydrothermal method.
그림 Fig. 2. FE-SEM images and particle size distribution histograms of silica nanoparticles fabricated by hydrothermal method with different reaction times of (a) 8h, (b) 15h, (c) 20h, and (d) 30h.
그림 Fig. 3. FT-IR spectra of silica nanoparticles synthesized by hydrothermal method with various reaction times of 8, 15, 20, and 30h and Stöber method.
그림 Fig. 4. (a) Schematic illustration for the formation of chain-like structures for electro-responsive ER fluids under the applied E field. (b) E field on-off tests of SiO₂-H8-, SiO₂-H15-, SiO₂-H20-, and SiO₂-H30-based ER fluids as a function of applied E field strengths of 1.0, 2.0, and 3.0kV mm^-1 with fixed shear rate of 0.1s^-1. (c) The chain-like structure formation mechanisms of SiO₂-H8- and SiO₂-H30-based ER fluids and tentative constructive reinforcing effect of SiO₂-H30 materials owing to the mixed size of particles. (d) Optical microscope images of the chain-like structure formation of SiO₂-H30-based ER fluid under applied E field.
표 Table 1. ER Performances of SiO₂-H8-, SiO₂-H15-, SiO₂-H20-, and SiO₂-H30-based ER Fluids Under Various Applied E Field Strengths

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표제어: PCR

동의어: Packet Collision Rate

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