[논문]반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구

김지원; 사민기; 추연룡; 제갈석; 김하영; 김찬교; 심형섭; 윤창민

doi:10.17137/korrae.2023.31.3.5

[국내논문] 반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구
A Comparative Study on Morphologies and Characteristics of Silica Nanoparticles Recycled from Silicon Sludge Waste of Semiconductor Process Based on Synthesis Methods 원문보기

유기물자원화 = Journal of the Korea Organic Resources Recycling Association, v.31 no.3, 2023년, pp.5 - 13

김지원 (한밭대학교 화학생명공학과) , 사민기 (한밭대학교 화학생명공학과) , 추연룡 (한밭대학교 화학생명공학과) , 제갈석 (한밭대학교 화학생명공학과) , 김하영 (한밭대학교 화학생명공학과) , 김찬교 (한밭대학교 화학생명공학과) , 심형섭 (세종대학교 항공우주공학과) , 윤창민 (한밭대학교 화학생명공학과)

초록
AI-Helper

본 연구에서는 반도체 공정에서 발생하는 폐실리콘 슬러지를 활용하여 고부가가치의 실리카 나노입자로 합성하는 방법들에 대한 비교 연구를 수행하였다. 상세히는, 폐실리콘 슬러지 내에 존재하는 금속과 유기 불순물을 산세 처리를 통해 제거한 뒤 졸-겔법과 수열합성법을 통해 실리카 나노입자로 제조하였다. 두 가지 합성법을 통해 제조된 실리카 나노입자에 대한 다양한 형상 및 특성 분석을 진행하였다. 그 결과, 졸-겔법으로 제조된 실리카 나노입자는 순도가 높고 균일한 형상으로 합성되었으며, 수열합성법은 수율과 단순한 제조법의 이점을 확인할 수 있었다. 본 비교 연구는 폐실리콘 슬러지에서 실리카 나노입자를 제조하는 두 가지 합성법에 대한 상세한 실험 결과를 제시하여, 반도체 공정에서 발생하는 부산물을 활용한 고부가가치 소재 제조법 정립에 기여할 것으로 기대된다.

Abstract ▼ AI-Helper

In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

주제어

표/그림 (5)

그림 Fig. 1. Schematic illustration for synthesis of silica nanoparticles using sol-gel and hydrothermal method employing silicon sludge waste.
그림 Fig. 2. FE-SEM images of (a) SG-SiO₂, (b) HT-SiO₂ materials and TEM images of (c) SG-SiO₂, (d) HT-SiO₂ materials.
그림 Fig. 3. FT-IR spectra of CM-SiO₂, SG-SiO₂, and HT-SiO₂ materials.
표 Table 1. Elemental Compositions of CM-SiO₂, SG-SiO₂, and HT-SiO₂ Materials^a
표 Table 2. Comparison of SG-SiO₂ and HT-SiO₂ Fabricated by Sol-gel and Hydrothermal Method

참고문헌 (42)

Zhang, L., Liu, Y., Liang, D., Kou, P., Wang, Y.,？Gao, Y., Li, D. and Liu, H ., "Local and Remote？Cooperative Control of Hybrid Distribution？Transformers Integrating Photovoltaics in Active？Distribution Networks", IEEE Transactions on？Sustainable Energy, 13(4), pp. 2012~2026. (2022).

상세보기
Liu, K.-T. and Chen, C.-H., "Formulation of research？and development strategy by analysing patent？portfolios of key players the semiconductor industry？according to patent strength and technical function",？World Patent Information, 70, p. 102125. (2022).

상세보기
Green, M. A., "Thin-film solar cells: review of？materials, technologies and commercial status",？Journal of Materials Science: Materials in Electronics,？18(1), pp. 15~19. (2007).
Lee, B.-T., Jang, D.-H. and Kim, T.-S., "Effect？of carbon addition on the microstructure of？Si3N4-Cfiber composites using semiconductor-waste？Si sludge", Journal of the European Ceramic Society,？24(8), pp. 2313~2318. (2004).

상세보기
K, J., Jekal, S., Kim, H.-Y., Kim, M. S., Kim,？D. H., Kim, C.-G., Chu, Y.-R., Lee, N. and Yoon,？C.-M., "Study of the Sludge Formation Mechanism？in Advanced Packaging Process and Prevention？Method for the Sludge", Journal of Korea Organic？Resource Recycling Association, 31(1), pp. 35~45.？(2023).
Jung, W.-G., Back, G.-S., Kim, J.-H., Chang, Y.-C.？and Yoo, S.-J., "Preliminary reduction of chromium？ore using Si sludge generated in silicon wafer？manufacturing process", Journal of Mining and？Metallurgy, Section B: Metallurgy, 54(1), pp. 29~37.？(2018).

상세보기
Lin, S. H. and Yang, C. R., "Chemical and physical？treatments of chemical mechanical polishing？wastewater from semiconductor fabrication", Journal？of Hazardous Materials, 108(1-2), pp. 103~109.？(2004).
Wang, W., Luo, Y. and Qiao, W., "Possible solutions？for sludge dewatering in China", Frontiers of？Environmental Science & Engineering in China,？4(1), pp. 102~107. (2010).

상세보기
Liang, Y., Xu, D., Feng, P., Hao, B., Guo, Y. and？Wang, S., "Municipal sewage sludge incineration？and its air pollution control", Journal of Cleaner？Production, 295, p. 126456. (2021).
Bye, G. and Ceccaroli, B., "Solar grade silicon:？Technology status and industrial trends", Solar？Energy Materials and Solar Cells, 130, pp. 634~646.？(2014).

상세보기
Liu, W.-T. and Li, K.-C., "Application of？Reutilization Technology to Calcium Fluoride Sludge？from Semiconductor Manufacturers", Journal of the？Air & Waste Management Association, 61(1), pp.？85~91. (2011).
Lee, T.-C., Lin, K.-L., Su, X.-W. and Lin, K.-K.,？"Recycling CMP sludge as a resource in concrete",？Construction and Building Materials, 30, pp. 243~251.？(2012).

상세보기
Jang, H. D., Kim, H., Chang, H., Kim, J., Roh,？K. M., Choi, J.-H., Cho, B.-G., Park, E., Kim, H.,？Luo, J. and Huang, J., "Aerosol-Assisted Extraction？of Silicon Nanoparticles from Wafer Slicing Waste？for Lithium Ion Batteries", Scientific Reports, 5(1),？p. 9431. (2015).
Ryu, J., Kim, W., Yun, J., Lee, K., Lee, J., Yu,？H., Kim, J. H., Kim, J. J. and Jang, J., "Fabrication？of Uniform Wrinkled Silica Nanoparticles and Thier？Application to Abrasives in Chemical Mechanical？Planarization", ACS Applied Materials & Interfaces,？10(14), pp. 11843~11851. (2018).
Linec, M. and Music, B., "The Effects of Silica-Based Fillers on the Properties of Epoxy Molding？Compounds", Materials, 12(11), p. 1811. (2019).

상세보기
Heo, G.-Y. and Park, S.-J., "Effect of coupling agents？on thermal, flow, and adhesion properties of epoxy/silica compounds for capillay underfill applications",？Powder Technology, 12(11), p. 1811. (2019).
Kim, D. H., Kim, J., Jekal, S., Kim, M. J., Kim, H.-Y.,？Kim, M., Kim, S.-C., Park, S.-Y. and Yoon, C.-M.,？"Synthesis of Sludge Waste-derived Semiconductor？Grade Uniform Colloidal Silica Nanoparticles and？Their CMP Application", Journal of Korea Organic？Resource Recycling Association, 30(3), pp. 5~12.？(2022).
Bondareva, J. V., Aslyamov, T. F., Kvashnin, A. G.,？Dyakonov, P. V., Kuzminova, Y. O., Mankelevich,？Y. A., Voronina, E. N., Dagesyan, S. A., Egorov, A.？V., Khmelnitsky, R. A., Tarkhov, M. A., Suetin, N.？V., Akhatov, I. S. and Evlashin, S. A., "Environmentally？Friendly Method of Silicon Recycling: Synthesis？of Silica Nanoparticles in an Aqueous Solution",？ACS Sustainable Chemistry & Engineering, 8(37),？pp. 14006~14012. (2020).

상세보기
Yoon, C.-M., Ryu, J., Yun, J., Kim, Y. K. and Jang, J., "Synthesis of Hierarchical Silica/Titania Hollow？Nanoparticles and Their Enhanced Electroresponsive？Activity", ACS Applied Materials & Interfaces,？10(7), pp. 6570~6579. (2018).

상세보기
Yoon, C.-M., Jang, Y., Lee, S. and Jang, J., "Dual？electric and magnetic responsivity of smart fluids？containing multilayered magnetite-embedded core/shell？silica/titania nanoparticles having an outermost？silica shell", Journal of Materials Chemistry C, 6(38),？pp. 10241~10249. (2018).
Yoon, C.-M., Jang, Y., Noh, J., Kim, J., Lee, K.？and Jang, J., "Enhanced Electrorheological Performance？of Mixed Silica Nanomaterial Geometry", ACS Applied？Materials & Interfaces, 9(41), pp. 36358~36367.？(2017).

상세보기
Kim, H.-Y., Jekal, S., Lee, N., Sa, M., Kim, D.？H., Kim, M. S., Kim, J. and Yoon, C.-M., "Synthesis？of Uniform Silica Nanoparticles using Tap, Industrial,？and Stream water and Their Application to Electro-responsive Smart Fluid System", Journal of Korea？Organic Resource Recycling Association, 31(1), pp.？47~56. (2023).
Kreyling, W. G., Semmler-Behnke, M. and Chaudhry,？Q., "A complementary definition of nanomaterial",？Nano Today, 5(3), pp. 165~168. (2010).

상세보기
Mazzola, L., "Commercializing nanotechnology",？Nature Biotechnology, 21, pp. 1137~1143. (2003).

상세보기
Khan, I., Saeed, K. and Khan, I., "Nanoparticles:？Properties, applications and toxicities", Arabian？Journal of Chemistry, 12(7), pp. 908~931. (2019).

상세보기
Baig, N., Kammakakam, I. and Falath, W.,？"Nanomaterials: a review of synthesis methods,？properties, recent progress, and challenges",？Materials Advances, 2(6), pp. 1821~1871. (2021).

상세보기
Mazari, S. A., Ali, E., Abro, R., Khan, F. S. A.,？Ahmed, I., Ahmed, M., Nizamuddin, S., Siddiqui,？T. H., Hossain, N., Mubarak, N. M. and Shah,？A., "Nanomaterials: Applications, waste-handling,？environmental toxicities, and future challenges -？A review", Journal of Environmental Chemical？Engineering, 9(2), p. 105028. (2021).

상세보기
H an, X. X., Ji, W., Zhao, B. and Ozaki, Y.,？"Semiconductor-enhanced Raman scattering: active？nanomaterials and applications", Nanoscale, 9(15),？pp. 4847~4861. (2017).

상세보기
Pomerantseva, E., Bonaccorso, F., Cui, Y. and？Gogotsi, Y., "Energy storage: The future enabled by？nanomaterials", Science, 366(6468), pp. 969. (2019).

상세보기
Kumar, N. and Ray, S. S., "Synthesis and Functionalization of Nanomaterials", Processing of Polymer-based Nanocomposites, 277, pp. 15~55. (2018).
Fang, J., Zhou, Z., Xiao, M., Lou, Z., Wei, Z.？and Shen, G., "Recent advances in low-dimensional？semiconductor nanomaterials and their applications？in high-performance photodetectors", InfoMat, 2(2),？pp. 235~433. (2020).
Zhang, L., Wang, J. and Tian, Y., "Electrochemical？in-vivo sensors using nanomaterials made from？carbon species, noble metals, or semiconductors",？Microchimica Acta, 181, pp. 1471~1484. (2014).

상세보기
Chen, J.-F., Wang, Y.-H., Guo, F., Wang, X.-M.？and Zheng, C., "Synthesis of Nanoparticles with Novel？Technology: High-Gravity Reactive Precipitation",？Industrial & Engineering Chemistry Research, 39(4),？pp. 948~954. (2000).

상세보기
Chen, S.-L., Dong, P., Yang, G.-H. and Yang,？J.-J., "Kinetics of Formation of Monodisperse？Colloidal Silica Particles through the Hydrolysis？and Condensation of Tetraethylorthosilicate", Industrial？& Engineering Chemistry Research, 35(12), pp.？4487~4493. (1996).

상세보기
Lee, S., Yoon, C.-M., Hong, J.-Y. and Jang, J.,？"Enhanced electrorheological performance of a？graphene oxide-wrapped silica rod with a high aspect？ratio", Journal of Materials Chemistry C, 2(30),？pp. 6010~6016. (2014).
Vrancken, K. C., Coster, L. D., Voort, P. V. D.,？Grobet, P. J. and Vansant, E. F., "The Role of？Silanols in the Modification of Silica Gel with？Aminosilanes", Journal of Colloid and Interface Science, 170(1), pp. 71~77. (1995).

상세보기
Ahmadian-Fard-Fini, S., Salavati-Niasari, M. and？Safardoust-Hojaghan, H., "Hydrothermal green？synthesis and photocatalytic activity of magnetic？CoFe 2 O 4 -carbon quantum dots nanocomposite by？turmeric precursor", Journal of Materials Science:？Materials in Electronics, 28(21), pp. 16502~16214.？(2017).
Kaya, H., Ngo, D., Gin, S. and Kim, S. H., "Spectral？changes in Si-O-Si stretching band of porous glass？network upon ingress of water", Journal of Non-Crystalline Solids, 527, p. 119722. (2020).
Tyagi, P. K., Sharma, S., Tyagi, S., Mishra, A. and？Gola, D., "Toxicity assessment of silica nanoparticles,？and their conjugates with curcumin on Drosophila？melanogaster", Environmental Nanotechnology,？Monitoring & Management, 17, p. 100616. (2022).

상세보기
Jacobs, J. H., Deering, C. E., Sui, R., Cann, A.？P., Lesage, K. L. and Marriott, R. A., "The role？of carbon dioxide and water in the degradation of？zeolite 4A, zeolite 13X and silica gels", New Journal？of Chemistry, 47, pp. 5249~5261. (2023).
Ndayishimiye, A., Largeteau, A., Mornet, S.,？Duttine, M., Dourges, M.-A., Denux, D., Verdier,？M., Goune, M., Beauvoir, T. H. D., Elissalde, C.？and Goglio, G., "Hydrothermal Sintering for？Densifigation of Silica. Evidence for the Role of？Water", Journal of the European Ceramic Society,？38(4), pp. 1860~1870. (2018).
Blin, J. L. and Carteret, C., "Investigation of the？Silanols Groups of Mesostructured Silica Prepared？Using a Fluorinated Surfactant: Influence of the？Hydrothermal Temperature", The Journal of Physical？Chemistry C, 111(39), pp. 14380~14388. (2007).

상세보기

표제어: PCR

동의어: Packet Collision Rate

용어 설명 출처 목록 (6)

용어 설명: PCR은 세균 특이성이 있는 primer를 이용하여 적은 수의 세균이 있을지라도 쉽게 검출할 수 있는 유용한 방법이며, 이를 이용하여 구강 내 치면세균막이나 타액에서 직접 세균을 검출할 수 있게 되었다[8].

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