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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.3, 2023년, pp.52 - 61
We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostat...
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