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Optics express, v.30 no.11, 2022년, pp.18552 -
Lee, Tzu-Yi (National Yang Ming Chiao Tung University) , Huang, Yu-Ming (National Yang Ming Chiao Tung University) , Chiang, Hsin (National Yang Ming Chiao Tung University) , Chao, Chu-Li (Industrial Technology Research Institute) , Hung, Chu-Yin (Industrial Technology Research Institute) , Kuo, Wei-Hung (Industrial Technology Research Institute) , Fang, Yen-Hsiang (Industrial Technology Research Institute) , Chu, Mu-Tao (Industrial Technology Research Institute) , Wu, Chih-I (Industrial Technology Research Institute) , Lin, Chien-chung (Industrial Technology Research Institute) , Kuo, Hao-Chung (National Yang Ming Chiao Tung University)
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The effect of atomic-layer deposition (ALD) sidewall passivation on the enhancement of the electrical and optical efficiency of micro-light-emitting diode (µ-LED) is investigated. Various blue light µ-LED devices (from 5 × 5 µm2 to 100 × 100 µm2) with ALD-Al2O3 si...
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