최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기Microelectronic engineering, v.83 no.4/9, 2006년, pp.962 - 967
Kim, Ho Seob (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Kim, Young Chul (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Kim, Dae-Wook (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Ahn, Seung Joon (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Jang, Yong (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Kim, Hyung Woo (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Seong, Do Jin (Department of Physics and CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan City, Chung-Nam 336-708, Republic of Korea) , Park, Kyoung Wan (CEBT Co. Ltd., Asan City 336-708, Republic of Korea) , Park, Seong Soon (CEBT Co.) , Kim, Byung Jin
AbstractA compact sized low energy microcolumn system has been developed for mask-less lithography application. The microcolumn has high throughput capabilities as well as high resolution using arrayed microcolumn structures. A number of arrayed microcolumn structures have been studied based on sing...
International Sematech, 2004 Roadmap.
J. Vac. Sci. Technol. B Gil 22 3431 2004 10.1116/1.1823431
B.J. Lin, Presented at MNE 2005 conference.
J. Vac. Sci. Technol. B Kratschmer 13 2498 1995 10.1116/1.588381
Microelectron. Eng. Chang 32 113 1996 10.1016/0167-9317(95)00366-5
J. Vac. Sci. Technol. B Kratschmer 14 3792 1996 10.1116/1.588669
J. Vac. Sci. Technol. B Chang 14 3774 1996 10.1116/1.588666
J. Vac. Sci. Technol. B Muray 18 3099 2000 10.1116/1.1321760
Microelectron. Eng. Chang 57-58 117 2001 10.1016/S0167-9317(01)00528-7
Jpn. J. Appl. Phys. Kim 42 4084 2003 10.1143/JJAP.42.4084
J. Korean Phys. Soc. Kim 45 1214 2004
Jpn. J. Appl. Phys. B Jeong 44 5565 2005 10.1143/JJAP.44.5565
Microelectron. Eng. Kim 78-79 55 2005 10.1016/j.mee.2004.12.092
J. Vac. Sci. Technol. B Kim 12 3413 1994 10.1116/1.587523
J. Vac. Sci. Technol. B Kim 15 2284 1997 10.1116/1.589630
J. Korean. Phys. Soc. Kim 43 831 2003 10.3938/jkps.43.831
Jpn. J. Appl. Phys. B Park 43 3986 2004 10.1143/JJAP.43.3986
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.