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Study of SU-8 to make a Ni master-mold: Adhesion, sidewall profile, and removal

Electrophoresis, v.27 no.16, 2006년, pp.3284 - 3296  

Kim, Sung-Jin (Biosensor Group, Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea) ,  Yang, Haesik (Biosensor Group, Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea) ,  Kim, Kyuwon (Biosensor Group, Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea) ,  Lim, Yong Taik (Biosensor Group, Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea) ,  Pyo, Hyeon-Bong (Biosensor Group, Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea)

Abstract AI-Helper 아이콘AI-Helper

For disposable microfluidic devices, easy and inexpensive fabrication is essential. Consequently, replication of microfluidic devices, using injection molding or hot embossing, from a master-mold is widely used. However, the conventional master-mold fabrication technique is unsatisfactory in terms o...

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